Abstract: A thermal processing apparatus and method in which a first laser source, for example, a CO2 emitting at 10.6 ?m is focused onto a silicon wafer as a line beam and a second laser source, for example, a GaAs laser bar emitting at 808 nm is focused onto the wafer as a larger beam surrounding the line beam. The two beams are scanned in synchronism in the direction of the narrow dimension of the line beam to create a narrow heating pulse from the line beam when activated by the larger beam. The energy of GaAs radiation is greater than the silicon bandgap energy and creates free carriers. The energy of the CO2 radiation is less than the silicon bandgap energy so silicon is otherwise transparent to it, but the long wavelength radiation is absorbed by the free carriers.

Abstract: Embodiments of the present invention provide apparatus and method for reducing non uniformity during thermal processing. One embodiment provides an apparatus for processing a substrate comprising a chamber body defining a processing volume, a substrate support disposed in the processing volume, wherein the substrate support is configured to rotate the substrate, a sensor assembly configured to measure temperature of the substrate at a plurality of locations, and one or more pulse heating elements configured to provide pulsed energy towards the processing volume.

Abstract: A blowout protector for use between sections of well tubing at a well head comprises a flat rectangular housing having top and bottom plates with aligned openings connected to the respective tubing sections, the housing defining an internal chamber. A closure plate is movable piston-wise within the chamber between respective terminal positions at opposite ends of the chamber. The closure plate has an opening therein which aligns with the respective openings in the top and bottom plates when the closure plate is in one terminal position in order to allow well fluid to flow through the protector. In the other terminal position the closure plate forms a barrier to fluid flow through the housing. Fluid pressure inlet and exhaust ports are provided at opposite ends of the housing for moving the closure plate between its respective positions.

Abstract: A rotary drilling head for a rotary drilling apparatus including a hollow or tubular base including a discharge outlet and a lower end adapted to be mounted on a well casing, or the like, and a housing with a rotatable spindle therein insertable into the base in a sealed relationship with the spindle including a stripper rubber at the lower end thereof, and a non-metallic driving connection with the Kelly bar at the upper end and journaled internally of the housing through thrust bearing assemblies and sealed in relation thereto by a plurality of unique seal arrangements. Pressurized lubrication is communicated with a passageway defined between the housing and rotatable spindle to provide continuous pressurized lubrication by an air-oil mist. The housing is removably secured to the base by a split clamp structure to facilitate assembly and disassembly of the housing and spindle components with respect to the base.