Patents by Inventor Joseph Mathuni

Joseph Mathuni has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for manufacturing accurate structures with a high aspect ratio and particularly for manufacturing X-ray absorber masks
    Patent number: 4587184
    Abstract: A method for manufacturing structures having dimensions in a range of 1 .mu.m and below in a layer of material by applying an auxiliary layer consisting of metal or metal oxide on the layer to be structured and utilizing a lacquer mask to structure the auxiliary layer to form a mass therein for the etching of the layer to be structured, characterized by passivating the auxiliary layer by applying a protective layer to prevent oxidizing of the auxiliary layer until a desired time. The protective layer can be gold or platinum and the auxiliary layer can be selected from a group consisting of titanium, hafnium, zirconium, vanadium, chromium, manganese, aluminum, niobium and tantalum. The method is particularly useful to manufacuture absorber structures of X-ray masks that are used in microelectronics.
    Type: Grant
    Filed: June 7, 1984
    Date of Patent: May 6, 1986
    Assignee: Siemens Aktiengesellschaft
    Inventors: Brigitte Schneider-Gmelch, Joseph Mathuni