Abstract: A method for generating extreme ultraviolet radiation and soft x-ray radiation with a gas discharge operated on the left branch of the Paschen curve, in particular, for EUV lithography, wherein a discharge chamber (10) of a predetermined gas pressure and two electrodes (11, 12) are used, wherein the electrodes have an opening (14, 15), respectively, positioned on the same symmetry axis (13) and, in the course of a voltage increase (16) upon reaching a predetermined ignition voltage (Uz), generate a plasma (17) located in the area between their openings (14, 15), which plasma is a source of the radiation (17?) to be generated, wherein an ignition of the plasma (17) is realized by affecting the gas pressure and/or by triggering, and wherein, with the ignition of the plasma (17), an energy storage device supplies by means of the electrodes (11, 12) stored energy into the plasma (17), characterized in that the ignition of the plasma (17) is realized by using a predetermined ignition delay (18).

Abstract: The invention relates to a gas discharge lamp for EUV radiation with an anode (1) and a hollow cathode (2), wherein the hollow cathode (2) has at least two openings (3, 3?) and the anode (1) has a through hole (4), which is characterized in that the longitudinal axes (5, 5?) of the hollow cathode openings (3) have a common point of intersection S lying on the axis of symmetry (6) of the anode opening (4).

Abstract: In a method for generating extreme ultraviolet radiation or soft x-ray radiation by means of gas discharge, in particular, for EUV lithography, a discharge vessel is provided with two electrodes that are connected to high voltage. Between the electrodes, in an area of two electrode recesses that are coaxial to one another, a gas fill with predetermined gas pressure in accordance with a discharge operation realized on the left branch of the Paschen curve is provided. In this area, a plasma emitting the radiation is generated when supplying energy. The plasma is displaced or deformed by a pressure change of the gas fill in the area of the electrode recesses.

Abstract: In a method for generating extreme ultraviolet radiation or soft x-ray radiation by means of gas discharge, in particular, for EUV lithography, a discharge vessel is provided with two electrodes that are connected to high voltage. Between the electrodes, in an area of two electrode recesses that are coaxial to one another, a gas fill with predetermined gas pressure in accordance with a discharge operation realized on the left branch of the Paschen curve is provided. In this area, a plasma emitting the radiation is generated when supplying energy. The plasma is displaced or deformed by a pressure change of the gas fill in the area of the electrode recesses.

Abstract: A method for generating extreme ultraviolet radiation and soft x-ray radiation with a gas discharge operated on the left branch of the Paschen curve, in particular, for EUV lithography,

Abstract: A magnetodielectric ceramic composite material comprising a first disperse phase which contains one or more magnetic ferrites, and a second, essentially continuous phase which contains electrically insulating oxides, characterized in that the electrically insulating oxides are lead(II) oxide, bismuth(III) oxide and, optionally, boron(III) oxide, is distinguished by an improved construction of the surface boundary layer. Said composite material can very suitably be used for the manufacture of frequency-selective components and wideband transmitters having a high initial permeability and a high critical frequency f.sub.0 in the range from 1 . . . 200 MHz, and for the manufacture of monolithic, multifunctional components. A description is given of a simple method of manufacturing said composite material.

Abstract: A torsional actuator consisting of multilayers of monolithic piezo-electric ceramic material, with planar electrodes between the successive layers and external contacts for supplying control voltages to the electrodes which cause the actuator to twist about its longitudinal axis by a torsion angle dependent on the control voltages. Viewed in cross-section, and with respect to a reference potential supplied to alternate ones of the electrodes, the remaining electrodes are in four respective quadrants and are supplied with control voltages of polarities dependent on the quadrants in which they are located.

Abstract: A radiation detector having a radiation detection element of a pyroelectric ceramic material on the basis of lead titanate, the composition of which corresponds to the formula Pb.sub.1-(x+0.5(x-y)) RE.sub.x (Ti.sub.1-y Mn.sub.y)O.sub.3, where RE is at least one rare earth metal and 0.04.ltoreq.x.ltoreq.0.20 and 0.01.ltoreq.y.ltoreq.0.04. The element is disposed within a windowed housing.