Patents by Inventor Joseph Paul Blasko

Joseph Paul Blasko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of fabricating circuits
    Patent number: 5912187
    Abstract: A method of fabricating an integrated circuit device is described in which fluorine ions are implanted into the patterned photoresist and the exposed polysilicon layer prior to etching the polysilicon. The ion implantation minimizes the chemical reaction between the photoresist and etchant, thereby significantly reducing the formation of polysilicon etch delta, and also significantly reducing etch delta variation due to pattern density variations.
    Type: Grant
    Filed: June 10, 1997
    Date of Patent: June 15, 1999
    Assignee: Lucent Technologies Inc.
    Inventors: Joseph Paul Blasko, Robert John Griffin