Patents by Inventor Joseph Philip Walko, II

Joseph Philip Walko, II has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Efficient plasma containment structure
    Patent number: 6221202
    Abstract: Plasma containment is achieved within a region by a containment plate while gas is allowed to flow through this region by openings in the plate. The openings in the plate are larger in two of the cross-sectional dimensions parallel to the plate surface than the thickness of the dark space or plasma sheath. The openings of the plate are wider nearest the source of the electromagnetic energy in order to attenuate the electromagnetic fields and thereby prevent build up of deposits which would block the flow gas through the plate.
    Type: Grant
    Filed: April 1, 1999
    Date of Patent: April 24, 2001
    Assignee: International Business Machines Corporation
    Inventor: Joseph Philip Walko, II
  • High conductance plasma containment structure
    Patent number: 6051100
    Abstract: Plasma containment is achieved within a region by a containment plate while gas is allowed to flow through this region by openings in the plate. The openings in the plate are larger in two of the cross-sectional dimensions parallel to the plate surface than the thickness of the dark space or plasma sheath. This plasma containment plate allows high conductance for conditions including those of long molecular mean free path and thick material deposits on the interior chamber of the plasma reactor.
    Type: Grant
    Filed: October 24, 1997
    Date of Patent: April 18, 2000
    Assignee: International Business Machines Corporation
    Inventor: Joseph Philip Walko, II