Abstract: In forming an insulating film upon a selected region of a sample, a gaseous vapor is directed over the selected region for depositing a compound of the gaseous vapor containing elements of the insulating film. A charged particle beam is directed toward the selected region in order to decompose the deposited compound and provide the desired insulating film.

Abstract: A focused ion beam is directed toward a sample to be analyzed while iodine vapor is directed toward the sample. The iodine vapor, which is formed by heating solid iodine to a temperature of 30.degree. C. to 50.degree. C., aids in sputtering of material impinged by the ion beam and in enhancing the conversion of neutral to ionic sputtered species. A quadrupole mass analyzer is positioned for receiving secondary ions sputtered from the sample whereby chemical analysis is accomplished. The iodine may be initially handled in a solid state, exhibiting a low vapor pressure, and is then heated to moderate temperatures inside a focused ion beam system without presenting a toxic hazard or requiring external plumbing.

Abstract: A longitudinally coupled, coherent, surface emitting semiconductor laser array in a monolithic wafer is disclosed. Active regions of diode laser-striped semiconductor material are focused ion beam (FIB) micromachined to form transversely disposed channels of symmetric, opposed, generally parabolic mirrored surfaces. Diode laser pairs, emitting laser energy in a generally horizontal plane, are longitudinally injection-coupled (phase-locked) by semi-transmissive, opposed regions that are micromachined into the otherwise reflective parabolic surfaces of the channel. Coherent, laser energy is reflected thereby generally normally away from the surface of the monolithic structure.

Abstract: A coherent, two-dimensional, phase-locked, surface emitting semiconductor laser array in a monolithic wafer is disclosed. Active regions of diode laser-striped semiconductor material are focused ion beam (FIB) micromachined to form transversely disposed channels of symmetric, opposed, generally parabolic, mirrored surfaces. Multiple diode laser pairs, emitting laser energy in a generally horizontal plane, are longitudinally injection-coupled (phase-locked) by semitransmissive, opposed regions that are micromachined into the otherwise reflective parabolic surfaces of each channel. Inherently, the striped material permits evanescent coupling, in an axis generally perpendicular to the longitudinal, injection-coupled axis. Thus, coupling is achieved in two dimensions across the extent of the array. High-power, coherent, laser energy is reflected thereby generally normally away from the surface of the monolithic structure.

Abstract: A method of forming one or more optical surfaces of the designer's choice in a body of material. The method includes the steps of exposing in a work zone a selected face in a body of selected material, directing a focused ion beam in a predetermined manner into the work zone to impinge the selected face, and by such directing and impinging, removing material from the body to create the desired optical surface(s). Preferably, beam direction is accomplished under the control of a suitably programmed computer.