Patents by Inventor Joseph S. Logan

Joseph S. Logan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reactive ion etching of aluminum
    Patent number: 3994793
    Abstract: A process for etching aluminum wherein a masked layer of aluminum, supported on a substrate, is exposed to a plasma formed by imposing an RF voltage across at least two spaced electrodes in an ambient including a gas selected from the group consisting of CCl.sub.4, Cl.sub.2, Br.sub.2, HCl. The resultant conditions provide a reactive environment where the aluminum is bombarded with chlorine or bromine ions. The aluminum reacts with chlorine or bromine ions to form an aluminum chloride or bromide compound, which is volatile at the temperature of the sputtered substrate.
    Type: Grant
    Filed: May 22, 1975
    Date of Patent: November 30, 1976
    Assignee: International Business Machines Corporation
    Inventors: Joseph M. Harvilchuck, Joseph S. Logan, William C. Metzger, Paul M. Schaible