Patents by Inventor Joseph Shindler

Joseph Shindler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optimization of sample plan for overlay
    Publication number: 20060074611
    Abstract: The present invention describes a method including: determining field-clustering scheme; selecting initial sample plan; establishing initial model of overlay, the initial model of overlay comprising components; and establishing efficient model of overlay from the initial model of overlay including: constructing matrices; identifying redundant components and eliminating the redundant components; and identifying highly-correlated components and determining whether to eliminate the highly-correlated components.
    Type: Application
    Filed: September 30, 2004
    Publication date: April 6, 2006
    Inventors: Alan Wong, Jeff Drautz, Joseph Shindler, Max Lau, George Chen