Patents by Inventor Joseph Sumakeris

Joseph Sumakeris has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Susceptor designs for silicon carbide thin films
    Patent number: 6217662
    Abstract: A susceptor is disclosed for minimizing or eliminating thermal gradients that affect a substrate wafer during epitaxial growth. The susceptor comprises a first susceptor portion including a surface for receiving a semiconductor substrate wafer thereon, and a second susceptor portion facing the substrate-receiving surface and spaced from the substrate-receiving surface. The spacing is sufficiently large to permit the flow of gases therebetween for epitaxial growth on a substrate on the surface, while small enough for the second susceptor portion to heat the exposed face of a substrate to substantially the same temperature as the first susceptor portion heats the face of a substrate that is in direct contact with the substrate-receiving surface.
    Type: Grant
    Filed: March 24, 1997
    Date of Patent: April 17, 2001
    Assignee: Cree, Inc.
    Inventors: Hua-Shuang Kong, Calvin Carter, Jr., Joseph Sumakeris