Abstract: The present disclosure relates to systems and methods for detecting anomalies in a semiconductor processing system. According to certain embodiments, one or more external sensors are mounted to a sub-fab component, communicating with the processing system via a communication channel different than a communication channel utilized by the sub-fab component and providing extrinsic sensor data that the sub-fab component is not configured to provide. The extrinsic sensor data may be combined with sensor data from a processing tool of the system and/or intrinsic sensor data of the sub-fab component to form virtual sensor data. In the event the virtual data exceeds or falls below a threshold, an intervention or a maintenance signal is dispatched, and in certain embodiments, an intervention or maintenance action is taken by the system.

Abstract: Known LCD devices of the type having an upper polarizer (36), a liquid crystal cell (28), a lower polarizer (38) and a reflector (42) and working using ambient light to provide illumination lose contrast because the light passes twice through both polarizers. By providing a layer of light concentrating plastic (44) between the upper polarizer (36) and the LCD cell (28), light emitted from bevelled edges (48) of an aperture (46) in the plastic is directed towards the cell and reflector directly, without passing through the upper polarizer (36). This is in addition to the normal ambient light passing through the front polarizer. This increases the intensity of light reaching the observer (20) and thus the contrast of the display.