Abstract: A method characterizes field of view (FOV) distortion and may correct machine vision measurements accordingly. A plurality of distorted images are acquired, with the same calibration target at a plurality of spaced-apart locations within the FOV. The method analyzes the images and determines distortion parameters that can correct the distortions in the images such that features included in the calibration target pattern achieve a sufficient or optimum degree of congruence between the various images. Distortion parameters may be determined for each optical configuration (e.g., lens combination, magnification, etc.) that is used by a machine vision inspection system. The distortion parameters may then be used to correct FOV distortion errors in subsequent inspection and measurement operations.

Abstract: A photoelectric encoder has a telecentric optical system in which a first lens and an aperture located at a focal position of the first lens are interposed between a main scale and a photoreceptor. At least a second lens is interposed between the aperture and the photoreceptor with a focus of the second lens on the aperture, thereby constituting a bilateral telecentric optical system. This makes it possible to improve the signal detection efficiency and increase the assembly tolerance.

Abstract: A hand-size structured-light three-dimensional metrology imaging system and method. Laser illumination stripes are scanned across a workpiece surface for obtaining z-height and x-coordinate information. A Scheimpflug configuration is used. Utilizing this configuration, a laser illumination stripe across a raised workpiece portion will be shown in a contour image at the image sensor in a focused manner, such that the offsets along the contour image line due to the raised portions of the workpiece surface can be accurately converted to a z-height measurement. The y-axis positions associated with each of the contour images, used for reassembling the information from the contour images into a surface map for the workpiece, may be determined without the need for a position sensor, by including a reference object in the contour images.

Abstract: A method for connecting optical signals carried by optical fibers between an optical encoder readhead and an optical signal processing IC having a plurality of photodetector portions arranged in a photodetector configuration. The optical signal processing IC is fixed to a substrate at a first position and orientation. Then, a reference-surface block including at least one reference surface is fixed to the substrate in a second orientation and position based on the first position and orientation. A fiber-optic end piece is provided, which has at least one corresponding-reference surface and a plurality of optical fiber locating features that are arranged relative to the corresponding-reference surface. A plurality of the optical fibers are fixed to the plurality of optical fiber locating features to provide a coupling configuration of optical fiber ends that nominally matches the photodetector configuration.

Abstract: An absolute distance measuring device based on laser interferometry may combine coarse, intermediate, and highest resolution measurement techniques to find the absolute distance to a sample surface with high resolution. The device may provide at least two laser wavelengths simultaneously, to allow reduction or elimination of certain common-mode error components, including dynamic error components. The device may scan at least one of the laser wavelengths over a relatively narrow range and may use quadrature detectors to provide enough signal data to allow certain self-corrections to be performed on the resulting scanned signals and measurements. A novel tunable laser and/or quadrature detector may provide advantages in combination with the device.

Abstract: Various exemplary embodiments may provide systems and methods for strobe illumination of a workpiece. The systems may include an illumination source, an image acquisition device and a control system. The illumination source may emit visible, UV, or near-IR light as a transient flash to the workpiece, the transient flash occurring in response to a lamp trigger. The illumination source may emit the light at an illumination intensity that rises from a begin threshold to a peak and afterwards diminishes to an end threshold during a flash duration. The image acquisition device may capture the light associated with the workpiece for an exposure duration starting from an exposure trigger. The control system may control the illumination source and the image acquisition device to synchronize the lamp trigger so that the exposure duration ends during the flash duration, such that a remaining portion of the flash does not affect the image exposure.

Abstract: A method of determining an amount of tilt may include projecting at least two coherent wavefronts toward a target surface, the wavefronts reflecting from the target surface to create an interference fringe pattern on a detector, and transmitting a beam toward the target surface, the transmitted beam reflecting from the target surface to form a beam spot on the detector. A fringe pitch indicative of a distance to the target surface may be determined based on the interference fringe pattern. A displacement on the detector of the beam spot, relative to a nominal location of the beam spot when the target surface is at a nominal angle of incidence relative to the beam, may be determined. The amount of tilt of the target surface relative to the nominal angle of incidence, may be determined based on the displacement of the beam spot and the determined fringe pitch.

Abstract: A system and method for improving the accuracy of a speckle-based image correlation displacement sensor provides ultra-high accuracy by ensuring that, in the absence of motion, the speckle image does not vary over time. In one embodiment, the speckle image is stabilized by reducing or compensating for laser diode wavelength changes. Various methods for stabilizing the wavelength include thermoelectric temperature control, measuring and correcting the wavelength by any suitable means, or providing a specific wavelength of light feedback from an external grating. Image stabilization may also be accomplished by monitoring the warm-up process of the system. Once the system is determined to have completed the warm-up process, an indicator is provided to the user to indicate that the system is ready for use. Sensor geometric configurations that reduce or eliminate wavelength-related errors are also disclosed.

Abstract: All-optical output precision measuring gauges that sense the displacement of an internal scale grating are disclosed. Each type of gauge includes a compact, miniature, or ultra-miniature optical readhead that includes a light source for transmitting light to the scale grating, and optical-fiber detector channels for receiving light from the scale grating and outputting optical measuring signals from the gauge. In various embodiments, the optical-fiber detector channels have respective phase grating masks for receiving a periodic light pattern that moves in correspondence to the scale grating, and the channels are arranged in balanced pairs. In various embodiments, the optical readhead is an interferometric-type optical readhead that provides a measuring resolution as fine as 10-50 nanometers or less. In various embodiments, the gauge is provided in an unprecedented miniature size. In various embodiments, the gauge is motorized to provide a precision actuator.

Abstract: A position sensor using a novel structured light generating scale or target member is provided. An imaging array is capable of measuring the relative translation and orientation of the structured light generating scale or target member in X, Y, Z, yaw, pitch, and roll (“6D”) simultaneously, and with high precision. The target member includes an array of lenses that provide an array of structured light patterns that diverge, converge, or both, to change the size of the corresponding structured light image as a function of the “Z” coordinate of the relative position, in various embodiments. The X-Y position of each individual structured light image on the imaging array varies with the relative X-Y position of the structured light generating target member, and the shape of structured light image changes as a function of the relative angular orientation.

Abstract: A position sensor using a novel optical path array (OPA) element, an angle-selective spatial filter, and an imaging array is capable of measuring the translation and orientation relative to a target member in X, Y, Z, yaw, pitch, and roll (“6D”) simultaneously, and with high precision. A target member includes an array of target points surrounded by a contrasting surface. The position sensor uses the OPA element in combination with the angle-selective spatial filter in a target point imaging arrangement such that the imaging array of the position sensor only receives light rays that enter the OPA element according to an operable cone angle ?. Accordingly, each target point generally produces a ring-shaped image having a size on the imaging array that varies with the Z position of each target point. The X-Y position of each target point image on the imaging array varies with the X-Y position of each target point.

Abstract: An external cavity laser has a wavelength of the laser output that is tuned by a rotary tuning element mounted on the axle of a motor. The rotary tuning element includes a variable thickness interference film for wavelength selection, and a variable thickness compensation prism to adjust the cavity length appropriately for the selected wavelength, to stable wavelengths and mode-hop-free tuning ranges as the tuning element is rotated.

Abstract: An interferometric fiber optic encoder readhead for sensing the displacement of a scale grating is disclosed. The detector channels of the readhead are fiber optic detector channels having respective phase grating masks. The fiber optic encoder readhead is configured to detect the displacement of interference fringes arising from the scale grating. In various exemplary embodiments, the fiber optic readhead is constructed and operably positioned according to various design relationships that insure a compact mounting and a relatively ideal sinusoidal signal as a function of displacement. Accordingly, high levels of displacement signal interpolation may be achieved, allowing sub-micrometer displacement measurements. The fiber optic encoder readhead may be assembled in a particularly accurate and economical manner and may be provided in a package with dimensions on the order of 1-2 millimeters.

Abstract: A fiber optic readhead arrangement for imaging a scale onto a set of optical fiber receiver channels is disclosed. The readhead arrangement includes an imaging lens and may include an aperture positioned at a focal point of the imaging lens in a telecentric arrangement. An axicon lens may be utilized to direct source light away from the imaging lens and into a ring-shaped annular source lens which surrounds the imaging lens. A source lens may concentrate source light on the scale in an area where it will be imaged back through the imaging lens to the readhead. In one embodiment, multiple source fibers may be provided around the perimeter of the fiber optic readhead arrangement. In another embodiment, the receiver fibers may also function as source fibers. In various exemplary embodiments, high levels of displacement signal interpolation may be achieved to provide high resolution measurement.