Patents by Inventor Joseph W. Daggett

Joseph W. Daggett has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Coating methods and apparatus for coating
    Patent number: 7404681
    Abstract: Described are process control methods for spin-coating, and apparatuses and devices incorporating the same, wherein the method is useful for application of developer solution to a substrate, and wherein the process control method includes one or more features of: interrupted serial process control using an interrupt signal from a hardware or a software component, an interrupt service routine, and a multiple process commands initiated at durations measured in parallel from an earlier process event.
    Type: Grant
    Filed: May 31, 2000
    Date of Patent: July 29, 2008
    Assignee: FSI International, Inc.
    Inventors: Samuel A. Cooper, Joseph W. Daggett
  • Liquid coating device with barometric pressure compensation
    Patent number: 7238239
    Abstract: A liquid coating device and method for coating a coatable composition on a workpiece to form a coating, wherein a parameter indicative of barometric pressure is measured and at least one thickness-affecting process parameter is adjusted in order to compensate for the effects of variations in barometric pressure on coating thickness uniformity.
    Type: Grant
    Filed: July 28, 2003
    Date of Patent: July 3, 2007
    Assignee: FSI International, Inc.
    Inventors: Joseph W. Daggett, Daniel J. Williams, Kevin G. Kemp, Joseph W. Cayton
  • Liquid coating device with barometric pressure compensation
    Publication number: 20040216664
    Abstract: A liquid coating device and method for coating a coatable composition on a workpiece to form a coating, wherein a parameter indicative of barometric pressure is measured and at least one thickness-affecting process parameter is adjusted in order to compensate for the effects of variations in barometric pressure on coating thickness uniformity.
    Type: Application
    Filed: July 28, 2003
    Publication date: November 4, 2004
    Inventors: Joseph W. Daggett, Daniel J. Williams, Kevin G. Kemp, Joseph W. Cayton
  • Liquid coating device with barometric pressure compensation
    Patent number: 6599560
    Abstract: A liquid coating device and method for coating a coatable composition on a workpiece to form a coating, wherein a parameter indicative of barometric pressure is measured and at least one thickness-affecting process parameter is adjusted in order to compensate for the effects of variations in barometric pressure on coating thickness uniformity.
    Type: Grant
    Filed: September 16, 1999
    Date of Patent: July 29, 2003
    Assignee: FSI International, Inc.
    Inventors: Joseph W. Daggett, Daniel J. Williams, Kevin G. Kemp, Joseph W. Cayton