Abstract: A semiconductor device includes a gate electrode disposed on a fin, a gate spacer disposed on the fin and a sidewall of the gate electrode, a source/drain electrode disposed on the fin, and an air pocket structure interposed between the gate spacer and the source/drain electrode. The air pocket structure includes an air gap, a first sidewall, a top sealing, a second sidewall and a bottom sealing. The air gap is enclosed by the first sidewall, the top sealing, the second sidewall and the bottom sealing arranged in a clockwise sequence. The top sealing and the bottom sealing include the same material of an energy removable material.

Abstract: A semiconductor device includes a gate electrode disposed on a fin, a gate spacer disposed on the fin and a sidewall of the gate electrode, a source/drain electrode disposed on the fin, and an air pocket structure interposed between the gate spacer and the source/drain electrode. The air pocket structure includes an air gap, a first sidewall, a top sealing, a second sidewall and a bottom sealing. The air gap is enclosed by the first sidewall, the top sealing, the second sidewall and the bottom sealing arranged in a clockwise sequence. The top sealing and the bottom sealing include the same material of an energy removable material.

Abstract: Devices and systems for insulating integrated circuits from ultraviolet (“UV”) light are described. The device includes a conductive feature, a first and second UV blocking layer, a first and second insulating laver, and a conductive structure. The first insulating layer overlays the first UV blocking layer. A via opening extends through the first insulating layer and the first UV blocking layer. The second UV blocking layer overlays the first insulating laver. The second insulating layer overlays the second UV blocking layer. An interconnect trench is defined in the second insulating layer and second UV blocking layer. The conductive structure is electrically connected to the conductive feature and extends into the via opening and along the interconnect trench.

Abstract: An electronic device can include a conductive feature and an ultraviolet (“UV”) blocking layer overlying the conductive feature. The electronic device can also include an insulating layer overlying the UV blocking layer. The electronic device can further include a conductive structure extending into an opening within the insulating layer, wherein the conductive structure is electrically connected to the conductive feature. In one aspect, the UV blocking layer lies within 90 nm of the conductive structure. The insulating layer can be at least 4 times thicker than the UV blocking layer. In another aspect, a method can be used in forming the electronic device. In still a further aspect, a system can include the electronic device, a processor, and a display, wherein the processor is electrically coupled to the electronic device and the display.

Abstract: A process of forming an electronic device including forming a first ultraviolet (“UV”) blocking layer over a conductive feature, wherein the first UV blocking layer lies within 90 nm of the conductive structure; forming a first insulating layer over the first UV blocking layer; and patterning the first insulating layer and the first UV blocking layer to form a first opening extending to the conductive feature, wherein during the process, the first UV blocking layer is exposed to UV radiation.

Abstract: An electronic device can include a conductive feature and an ultraviolet (“UV”) blocking layer overlying the conductive feature. The electronic device can also include an insulating layer overlying the UV blocking layer. The electronic device can further include a conductive structure extending into an opening within the insulating layer, wherein the conductive structure is electrically connected to the conductive feature. In one aspect, the UV blocking layer lies within 90 nm of the conductive structure. The insulating layer can be at least 4 times thicker than the UV blocking layer. In another aspect, a method can be used in forming the electronic device. In still a further aspect, a system can include the electronic device, a processor, and a display, wherein the processor is electrically coupled to the electronic device and the display.