Abstract: A method for isolating a first region maintained at a first environment and a second region maintained at a second environment, wherein the first and second environments are different from each other. The method includes forming an airlock between the first region and the second region, in which the airlock includes a plurality of chambers, which are separated by gate valves, successively arranged along a guide path between the first region and the second region. The method also includes maintaining environments in the plurality of chambers so that an environment in one chamber is different from an environment in an adjacent chamber.

Abstract: An airlock system that includes a plurality of adjacent chambers successively arranged along a guide path. Predetermined pressures are produced in each chamber so that the predetermined pressure in each chamber is at a pressure different from the predetermined pressure produced in an adjacent chamber. Gate valves are positioned to separate adjacent chambers in order to maintain a pressure differential between the adjacent chambers.

Abstract: An airlock system that includes a plurality of adjacent chambers successively arranged along a guide path. Predetermined pressures are produced in each chamber so that the predetermined pressure in each chamber is at a pressure different from the predetermined pressure produced in an adjacent chamber. Gate valves are positioned to separate adjacent chambers in order to maintain a pressure differential between the adjacent chambers.