Patents by Inventor Joshua Clyne

Joshua Clyne has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Linear Stage for reflective electron beam lithography
    Patent number: 9690213
    Abstract: A linear stacked stage suitable for REBL may include a first upper fast stage configured to translate a first plurality of wafers in a first direction along a first axis, the first upper fast stage configured to secure a first plurality of wafers; a second upper fast stage configured to translate a second plurality of wafers in a second direction along the first axis, the second upper fast stage configured to secure the second plurality of wafers, the second direction opposite to the first direction, wherein the translation of the first upper fast stage and the translation of the second upper fast stage are configured to substantially eliminate inertial reaction forces generated by motion of the first upper fast stage and the second upper fast stage; and a carrier stage configured to translate the first and second upper fast stages along a second axis.
    Type: Grant
    Filed: September 6, 2012
    Date of Patent: June 27, 2017
    Assignee: KLA-Tencor Corporation
    Inventors: Upendra Ummethala, Layton Hale, Joshua Clyne, Samir Nayfeh, Mark Williams, Joseph A. Di Regolo, Andrew Wilson
  • Linear Stage for Reflective Electron Beam Lithography
    Publication number: 20130293865
    Abstract: A linear stacked stage suitable for REBL may include a first upper fast stage configured to translate a first plurality of wafers in a first direction along a first axis, the first upper fast stage configured to secure a first plurality of wafers; a second upper fast stage configured to translate a second plurality of wafers in a second direction along the first axis, the second upper fast stage configured to secure the second plurality of wafers, the second direction opposite to the first direction, wherein the translation of the first upper fast stage and the translation of the second upper fast stage are configured to substantially eliminate inertial reaction forces generated by motion of the first upper fast stage and the second upper fast stage; and a carrier stage configured to translate the first and second upper fast stages along a second axis.
    Type: Application
    Filed: September 6, 2012
    Publication date: November 7, 2013
    Applicant: KLA-TENCOR CORPORATION
    Inventors: Upendra Ummethala, Layton Hale, Joshua Clyne, Samir Nayfeh, Mark Williams, Joseph A. Di Regolo, Andrew Wilson
  • Camera filter
    Patent number: D754240
    Type: Grant
    Filed: November 13, 2012
    Date of Patent: April 19, 2016
    Assignee: GoPro, Inc.
    Inventors: Rudy Lucas Samuels, Jesse Baker, Joshua Clyne