Patents by Inventor Joshua J. Song

Joshua J. Song has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Enhanced adhesion for LIGA microfabrication by using a buffer layer
    Patent number: 6682870
    Abstract: The present invention is an improvement on the LIGA microfabrication process wherein a buffer layer is applied to the upper or working surface of a substrate prior to the placement of a resist onto the surface of the substrate. The buffer layer is made from an inert low-Z material (low atomic weight), a material that absorbs secondary X-rays emissions from the substrate that are generated from the substrate upon exposure to a primary X-rays source. Suitable materials for the buffer layer include polyamides and polyimide. The preferred polyimide is synthesized form pyromellitic anhydride and oxydianiline (PMDA-ODA).
    Type: Grant
    Filed: August 10, 2001
    Date of Patent: January 27, 2004
    Assignee: The United States of America as represented by the United States Department of Energy
    Inventors: Sateesh S. Bajikar, Francesco De Carlo, Joshua J. Song
  • Enhanced adhesion for LIGA microfabrication by using a buffer layer
    Patent number: 6277539
    Abstract: The present invention is an improvement on the LIGA microfabrication process wherein a buffer layer is applied to the upper or working surface of a substrate prior to the placement of a resist onto the surface of the substrate. The buffer layer is made from an inert low-Z material (low atomic weight), a material that absorbs secondary X-rays emissions from the substrate that are generated from the substrate upon exposure to a primary X-rays source. Suitable materials for the buffer layer include polyamides and polyimide. The preferred polyimide is synthesized form pyromellitic anhydride and oxydianiline (PMDA-ODA).
    Type: Grant
    Filed: May 22, 1998
    Date of Patent: August 21, 2001
    Assignee: The United States of America as represented by the United States Department of Energy
    Inventors: Sateesh S. Bajikar, Francesco De Carlo, Joshua J. Song