Abstract: The present invention relates generally to a new apparatus and method for providing a non-uniform light source. More particularly, the invention encompasses an apparatus that uses a modified quartz plate to provide a non-uniform light source. A method for such a non-uniform light source using a modified quartz plate is also disclosed.

Abstract: An apparatus and method are disclosed for laser raster scanning a substrate in an XY plane wherein a single motor is used to provide synchronized X-Y scanning by two mirrors positioned orthogonally and which move linearly in an XY plane relative to each other by the rotation of the motor shaft. A preferred embodiment uses a specially designed cam to provide back and forth laser scanning motion and an intermittent gear to provide indexing of the laser. The apparatus and method may be configured for various scan speeds, spot sizes, Y-axis indexing and X-axis scan at the object plane. Over scanning of the active XY area of the object plane is preferred to provide constant velocity and energy density over the active XY area.

Abstract: An airspaced, diffraction limited, seven element telecentric f-theta lens having a first meniscus lens concave to the incident side; a first bi-concave lens; a second meniscus lens convex to the incident side; a third meniscus lens concave to the incident side; a pair of bi-convex lenses; and a second bi-concave lens is disclosed. The second, third and fourth as well as the sixth and seventh lens elements are edge contact spaced.

Abstract: An air spaced reverse telephoto objective lens for use in a laser chemical vapor deposition system or the like having a quartz plate window. The objective lens includes a negative component having a first air-spaced doublet wherein each doublet element is made of crown glass and a negative meniscus crown glass element spaced from said first air-spaced doublet. The objective lens further includes an aperture stop, a positive component including second and third doublet components for effecting color correction, and a pair of bi-convex elements for effecting spherical aberration correction. The objective lens provides a common focal plane for both illuminating light and laser light passing through the objective lens and the quartz plate window.

Abstract: An achromatic zoom beam expander of the Galilean type. The disclosed zoom beam expander has three components, each having a doublet that is individually color corrected such that the zoom beam expander may be used with a laser such as an argon ion laser which generates light energy at several different wavelengths.