Abstract: A storage, delivery and retrieval system having a rear wall to which is affixed a plurality of shelves capable of supporting one or more wafer-carrying pods. The structure further includes a pair of vertical rails lying in a plane spaced from and substantially parallel to the shelf-supporting wall. The horizontal rail extends between and is translationally mounted to the vertical rails, which horizontal rail supports a gripper capable of movement along the horizontal rail. The movement of the horizontal rail along the vertical rails, and the movement of the gripper along the horizontal rail, allows the gripper to be positioned at any location within an X-Z plane including the storage shelves. The system includes a two-dimensional transport system. That is, all transport of the pods by the system occurs without the pods ever leaving the X-Z plane of the shelves. This feature contributes to the overall small footprint of the system.

Abstract: A method and apparatus for removing a semiconductor wafer cassette from a SMIF pod and for transferring the cassette along a vertical axis to a platform of a wafer processing station. The apparatus is comprised of a transfer device that includes a pair of gripping arms for gripping the wafer cassette from the sides of the cassette. Once gripped, the cassette moves with the transfer device upward along a vertical axis to make room for the platform to be extended from within the processing station to a position under the cassette. Thereafter, the direction of motion of the transfer device is reversed and the cassette is lowered onto the platform. Once seated on the platform, the gripping arms retract from the cassette, and the cassette is carried on the platform into the processing station.

Abstract: A method and apparatus for dry cleaning a semiconductor wafer storage and transport pod. After the pod is located with respect to the cleaning chamber and opened to expose the interior surfaces of the pod to the cleaning chamber, the pod is conditioned in preparation for the cleaning process. The conditioning of the pod includes purging the pod and cleaning chamber with an ionized nitrogen gas to rid the pod and cleaning chamber of airborne contaminants and to neutralize static electrical charges on the pod surfaces. The conditioning process further includes heating the pod surfaces to prevent condensation of moisture and organic contaminants thereon. After the conditioning process, the pod is cleaned with a dry aerosol sprayed onto the pod surfaces. The aerosol spray is comprised of an ionized carbon dioxide/nitrogen (CO.sub.2 /N.sub.2) gas and fine particles of CO.sub.2.

Abstract: A method and apparatus for removing a semiconductor wafer cassette from a SMIF pod and for transferring the cassette along a vertical axis to a platform of a wafer processing station. The apparatus is comprised of a transfer device that includes a pair of gripping arms for gripping the wafer cassette from the sides of the cassette. Once gripped, the cassette moves with the transfer device upward along a vertical axis to make room for the platform to be extended from within the processing station to a position under the cassette. Thereafter, the direction of motion of the transfer device is reversed and the cassette is lowered onto the platform. Once seated on the platform, the gripping arms retract from the cassette, and the cassette is carried on the platform into the processing station.

Abstract: A loadlock chamber for transferring one or more semiconductor wafers from a storage and transfer pod into high-vacuum process chambers in a contaminant free environment. The loadlock chamber includes mechanisms for separating a wafer-carrying cassette from the storage and transfer pod, mechanisms for transferring the cassette into a chamber which may be sealed and evacuated, and mechanisms for allowing transfer of wafers between the cassette and the various process chambers, wherein each of the mechanisms operates in an environment that is sealed against the external environment.

Abstract: The present invention involves a forward light housing assembly for use on a vehicle, specifically a conventional truck, that enhances the aerodynamic characteristics of the vehicle while eliminating any need to modify the vehicle's body or fenders to properly position its headlights and turn signals. The disclosed light housing assembly incorporates both headlights and a turn signal into a single package that can easily be attached to the leading edge of a fender in a way which blends into the fender's contour, thereby improving the aerodynamic characteristics of the vehicle.

Abstract: The vehicle, specifically a truck, having a tilt-forward hood is disclosed herein along with a pair of hinges mechanisms for pivotally connecting the hood to the front end section of the vehicle's main body for movement between a completely closed position and a fully opened position. Each hinge mechanism includes a main assembly movable between various adjustable positions for adjusting the position of the hood with respect to the vehicle's main body when the hood is in its closed position and a manually engagable member for moving the main assembly between its various adjustable positions in order to adjust the position of the hood. The main arrangement is located entirely under the hood when the latter is closed, whereby to hide it from view from outside the vehicle. At the same time, the manually engagable member is readily accessible from outside the vehicle when the hood is closed, whereby the hood can be adjusted without its having to be opened.

Abstract: An arrangement for latching and unlatching the hood of a motorized vehicle is disclosed herein. This arrangement utilizes a fluid inflatable component carried by a base member of the vehicle and a second component defining an externally accessable cavity carried by the hood. The hood may be closed while the inflatable component is in a deflated state. As it does so, the deflated component is caused to enter the cavity of the component carried by the hood. Thereafter, the inflatable component is inflated sufficient to prevent its removal from the cavity, thereby latching the hood in its closed position.