Abstract: A method includes receiving, by a processing device, first sensor data indicating a state of a wall corresponding to a first processing chamber. The first sensor data includes optical spectral data. The method further includes determining, by the processing device, a first value based on the first sensor data. The first value corresponds to a first amount of a product disposed along a surface of the wall at a first time. The method further includes determining, by the processing device, a first update to a first process operation associated with the first processing chamber based on the first value. The method further includes performing, by the processing device, one or more of (i) preparing a notification indicating the first update for presentation on a graphical user interface (GUI), or (ii) causing performance of the first process operation in accordance with the first update.

Abstract: A method includes providing a random or pseudo-random input to a first trained machine learning model trained to generate synthetic sensor time series data for a processing chamber. The method further includes providing first data indicative of one or more attributes of target synthetic sensor time series data to the first trained machine learning model. The method further includes receiving an output from the first trained machine learning model. The output includes synthetic sensor time series data associated with the processing chamber. The output is generated in view of the first data indicative of the one or more attributes.

Abstract: A method includes receiving first metrology data associated with first substrates produced by manufacturing equipment. The method further includes training a first machine learning model with data input including the first metrology data to generate a first trained machine learning model. The first trained machine learning model is capable of reducing dimensionality of second metrology data associated with second substrates produced by second manufacturing equipment to perform corrective actions associated with the second manufacturing equipment.