Patents by Inventor Joshua Tseng
Joshua Tseng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20240090564Abstract: Features relating to a vaporizer body are provided. The vaporizer body may include an outer shell that includes an inner region defined by an outer shell sidewall. A support structure is configured to fit within the inner region of the outer shell. The support structure includes a storage region defined by a top support structure, a bottom support structure, a bottom cap, and a gasket. An integrated board assembly is configured to fit within the storage region of the support structure. The integrated board assembly may include a printed circuit board assembly formed of multiple layers that form a rigid structure and that include an inner, flexible layer. A first antenna is integrated at a proximal end of the flexible layer, and a second antenna is integrated at a distal end of the flexible layer.Type: ApplicationFiled: April 24, 2023Publication date: March 21, 2024Inventors: Joshua Fu, Christopher Loental, Marko Markovic, Alexander Weiss, Alexander Ringrose, David Carlberg, Robyn Nariyoshi, Devin Spratt, Nicholas J. Hatton, Yen Jen Chang, Chen Yu Li, Barry Tseng, Prince Wang, Thomas Germann, Andreas Schaefer
-
Patent number: 10424517Abstract: A method for manufacturing a dual work function semiconductor device includes forming a first silicon oxide layer on a substrate and forming a first hafnium-containing dielectric material layer on the first silicon oxide layer. The method further includes forming an aluminum-containing dielectric material layer on the first hafnium-containing dielectric material layer and performing a thermal treatment to intermix the silicon oxide layer, the first hafnium-containing dielectric material layer and the aluminum-containing dielectric material layers. This results in an intermixing dielectric layer containing hafnium, aluminum, silicon, and oxygen. The method further includes forming a first metal-containing conductive layer on the intermixing dielectric layer and patterning the first metal-containing conductive layer and the intermixing dielectric layer, thereby forming a first gate stack in a first region.Type: GrantFiled: June 13, 2016Date of Patent: September 24, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Joshua Tseng, Yasutoshi Okuno, Lars-Ake Ragnarsson, Tom Schram, Stefan Kubicek, Thomas Y Hoffman, Naohisa Sengoku
-
Publication number: 20160365289Abstract: A method for manufacturing a dual work function semiconductor device includes forming a first silicon oxide layer on a substrate and forming a first hafnium-containing dielectric material layer on the first silicon oxide layer. The method further includes forming an aluminum-containing dielectric material layer on the first hafnium-containing dielectric material layer and performing a thermal treatment to intermix the silicon oxide layer, the first hafnium-containing dielectric material layer and the aluminum-containing dielectric material layers. This results in an intermixing dielectric layer containing hafnium, aluminum, silicon, and oxygen. The method further includes forming a first metal-containing conductive layer on the intermixing dielectric layer and patterning the first metal-containing conductive layer and the intermixing dielectric layer, thereby forming a first gate stack in a first region.Type: ApplicationFiled: June 13, 2016Publication date: December 15, 2016Inventors: Joshua Tseng, Yasutoshi Okuno, Lars-Ake Ragnarsson, Tom Schram, Stefan Kubicek, Thomas Y. Hoffmann, Naohisa Sengoku
-
Patent number: 9024299Abstract: A method for manufacturing a dual work function semiconductor device and the device made thereof are disclosed. In one aspect, a method includes providing a gate dielectric layer over a semiconductor substrate. The method further includes forming a metal layer over the gate dielectric layer. The method further includes forming a layer of gate filling material over the metal layer. The method further includes patterning the gate dielectric layer, the metal layer and the gate filling layer to form a first and a second gate stack. The method further includes removing the gate filling material only from the second gate stack thereby exposing the underlying metal layer. The method further includes converting the exposed metal layer into an metal oxide layer. The method further includes reforming the second gate stack with another gate filling material.Type: GrantFiled: October 13, 2009Date of Patent: May 5, 2015Assignees: IMEC, Taiwan Semiconductor Manufacturing Company, Ltd., Katholieke Universiteit LeuvenInventors: Zilan Li, Joshua Tseng, Thomas Witters, Stefan De Gendt
-
Patent number: 8384195Abstract: The present disclosure relates to a device comprising a mono-crystalline substrate, the mono-crystalline substrate having at least one recessed region which exposes predetermined crystallographic planes of the mono-crystalline substrate, the at least one recessed region further having a recess width and comprising a filling material and an embedded nanochannel, wherein the width, the shape, and the depth of the embedded nanochannel is determined by the recess width of the at least one recessed region and by the growth rate of the growth front of the filling material in a direction perpendicular to the exposed predetermined crystallographic planes. The present disclosure is also related to a method for manufacturing a nanochannel device.Type: GrantFiled: May 4, 2011Date of Patent: February 26, 2013Assignees: IMEC, Taiwan Semiconductor Manufacturing Company, Ltd., Katholieke Universiteit Leuven, K.U. Leuven R&DInventors: Gang Wang, Joshua Tseng, Roger Loo
-
Patent number: 8386637Abstract: Two or more network traffic processors connected with the same LAN and WAN are identified as neighbors. Neighboring network traffic processors cooperate to overcome asymmetric routing, thereby ensuring that related sequences of network traffic are processed by the same network proxy. A network proxy can be included in a network traffic processor or as a standalone unit. A network traffic processor that intercepts a new connection initiation by a client assigns a network proxy to handle all messages associated with that connection. The network traffic processor conveys connection information to neighboring network traffic processors. The neighboring network traffic processors use the connection information to redirect network traffic associated with the connection to the assigned network proxy, thereby overcoming the effects of asymmetric routing. The assigned network proxy handles redirected network traffic in much the same way that it would handle network traffic received directly.Type: GrantFiled: March 1, 2012Date of Patent: February 26, 2013Assignee: Riverbed Technology, Inc.Inventors: Kand Ly, Joshua Tseng, Steve McCanne
-
Publication number: 20120166661Abstract: Two or more network traffic processors connected with the same LAN and WAN are identified as neighbors. Neighboring network traffic processors cooperate to overcome asymmetric routing, thereby ensuring that related sequences of network traffic are processed by the same network proxy. A network proxy can be included in a network traffic processor or as a standalone unit. A network traffic processor that intercepts a new connection initiation by a client assigns a network proxy to handle all messages associated with that connection. The network traffic processor conveys connection information to neighboring network traffic processors. The neighboring network traffic processors use the connection information to redirect network traffic associated with the connection to the assigned network proxy, thereby overcoming the effects of asymmetric routing. The assigned network proxy handles redirected network traffic in much the same way that it would handle network traffic received directly.Type: ApplicationFiled: March 1, 2012Publication date: June 28, 2012Applicant: Riverbed Technology, Inc.Inventors: Kand Ly, Joshua Tseng, Steven McCanne
-
Patent number: 8140690Abstract: Two or more network traffic processors connected with the same LAN and WAN are identified as neighbors. Neighboring network traffic processors cooperate to overcome asymmetric routing, thereby ensuring that related sequences of network traffic are processed by the same network proxy. A network proxy can be included in a network traffic processor or as a standalone unit. A network traffic processor that intercepts a new connection initiation by a client assigns a network proxy to handle all messages associated with that connection. The network traffic processor conveys connection information to neighboring network traffic processors. The neighboring network traffic processors use the connection information to redirect network traffic associated with the connection to the assigned network proxy, thereby overcoming the effects of asymmetric routing. The assigned network proxy handles redirected network traffic in much the same way that it would handle network traffic received directly.Type: GrantFiled: December 9, 2008Date of Patent: March 20, 2012Assignee: Riverbed Technology, Inc.Inventors: Kand Ly, Joshua Tseng, Steve McCanne
-
Publication number: 20110272789Abstract: The present disclosure relates to a device comprising a mono-crystalline substrate, the mono-crystalline substrate having at least one recessed region which exposes predetermined crystallographic planes of the mono-crystalline substrate, the at least one recessed region further having a recess width and comprising a filling material and an embedded nanochannel, wherein the width, the shape, and the depth of the embedded nanochannel is determined by the recess width of the at least one recessed region and by the growth rate of the growth front of the filling material in a direction perpendicular to the exposed predetermined crystallographic planes. The present disclosure is also related to a method for manufacturing a nanochannel device.Type: ApplicationFiled: May 4, 2011Publication date: November 10, 2011Applicants: IMEC, KATHOLIEKE UNIVERSITEIT LEUVEN, K.U. LEUVEN R&D, TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Gang Wang, Joshua Tseng, Roger Loo
-
Patent number: 7829949Abstract: A metal gate/high-k dielectric semiconductor device provides an NMOS gate structure and a PMOS gate structure formed on a semiconductor substrate. The NMOS gate structure includes a high-k gate dielectric treated with a dopant impurity such as La and the high-k gate dielectric material of the PMOS gate structure is deficient of this dopant impurity and further includes a work function tuning layer over the high-k gate dielectric.Type: GrantFiled: October 23, 2009Date of Patent: November 9, 2010Assignee: Taiwan Semconductor Manufacturing Co., LtdInventors: Joshua Tseng, Kang-Cheng Lin, Ji-Yi Yang, Kuo-Tai Huang, Ryan Chia-Jen Chen
-
Publication number: 20100219481Abstract: A method for manufacturing a dual work function device is disclosed. In one aspect, the process includes a first and second region in a substrate. The method includes forming a first transistor in the first region which has a first work function. Subsequently, a second transistor is formed in the second region having a different work function. The process of forming the first transistor includes providing a first gate dielectric stack having a first gate dielectric layer and a first gate dielectric capping layer on the first gate dielectric layer, performing a thermal treatment to modify the first gate dielectric stack, the modified first gate dielectric stack defining the first work function, providing a first metal gate electrode layer on the modified first gate dielectric stack, and patterning the first metal gate electrode layer and the modified first gate dielectric stack.Type: ApplicationFiled: January 8, 2010Publication date: September 2, 2010Applicants: IMEC, Taiwan Semiconductor Manufacturing Company, Ltd., Panasonic CorporationInventors: Joshua Tseng, Yasutoshi Okuno, Lars-Ake Ragnarsson, Tom Schram, Stefan Kubicek, Thomas Y. Hoffmann, Naohisa Sengoku
-
Publication number: 20100109095Abstract: A method for manufacturing a dual work function semiconductor device and the device made thereof are disclosed. In one aspect, a method includes providing a gate dielectric layer over a semiconductor substrate. The method further includes forming a metal layer over the gate dielectric layer. The method further includes forming a layer of gate filling material over the metal layer. The method further includes patterning the gate dielectric layer, the metal layer and the gate filling layer to form a first and a second gate stack. The method further includes removing the gate filling material only from the second gate stack thereby exposing the underlying metal layer. The method further includes converting the exposed metal layer into an metal oxide layer. The method further includes reforming the second gate stack with another gate filling material.Type: ApplicationFiled: October 13, 2009Publication date: May 6, 2010Applicants: IMEC, Taiwan Semiconductor Manufacturing Company, Ltd., Katholieke Universiteit LeuvenInventors: Zilan Li, Joshua Tseng, Thomas Witters, Stefan De Gendt
-
Publication number: 20100044800Abstract: A metal gate/high-k dielectric semiconductor device provides an NMOS gate structure and a PMOS gate structure formed on a semiconductor substrate. The NMOS gate structure includes a high-k gate dielectric treated with a dopant impurity such as La and the high-k gate dielectric material of the PMOS gate structure is deficient of this dopant impurity and further includes a work function tuning layer over the high-k gate dielectric.Type: ApplicationFiled: October 23, 2009Publication date: February 25, 2010Inventors: Joshua Tseng, Kang-Cheng Lin, Ji-Yi Yang, Kuo-Tai Huang, Ryan Chia-Jen Chen
-
Patent number: 7625791Abstract: A metal gate/high-k dielectric semiconductor device provides an NMOS gate structure and a PMOS gate structure formed on a semiconductor substrate. The NMOS gate structure includes a high-k gate dielectric treated with a dopant impurity such as La and the high-k gate dielectric material of the PMOS gate structure is deficient of this dopant impurity and further includes a work function tuning layer over the high-k gate dielectric. A process for simultaneously forming the NMOS and PMOS gate structures includes forming the high-k gate dielectric material, and the work function tuning layer thereover, then selectively removing the work function tuning layer from the NMOS region and carrying out a plasma treatment to selectively dope the high-k gate dielectric material in the NMOS region with a dopant impurity while the high-k gate dielectric in the PMOS region is substantially free of the dopant impurity.Type: GrantFiled: October 29, 2007Date of Patent: December 1, 2009Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Joshua Tseng, Kang-Cheng Lin, Ji-Yi Yang, Kuo-Tai Huang, Ryan Chia-Jen Chen
-
Patent number: 7544606Abstract: A method of forming a metal feature in a low-k dielectric layer is provided. The method includes forming an opening in a low-k dielectric layer, forming a metal layer having a substantially planar surface over the low-k dielectric layer using spin-on method, and stress free polishing the metal layer. Preferably, the metal layer comprises copper or copper alloys. The metal layer preferably includes a first sub layer having a substantially non-planar surface and a second sub layer having a substantially planar surface on the first sub layer.Type: GrantFiled: June 1, 2005Date of Patent: June 9, 2009Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Jean Wang, Chia-Ming Yang, Henry Lo, Joshua Tseng
-
Publication number: 20090108365Abstract: A metal gate/high-k dielectric semiconductor device provides an NMOS gate structure and a PMOS gate structure formed on a semiconductor substrate. The NMOS gate structure includes a high-k gate dielectric treated with a dopant impurity such as La and the high-k gate dielectric material of the PMOS gate structure is deficient of this dopant impurity and further includes a work function tuning layer over the high-k gate dielectric. A process for simultaneously forming the NMOS and PMOS gate structures includes forming the high-k gate dielectric material, and the work function tuning layer thereover, then selectively removing the work function tuning layer from the NMOS region and carrying out a plasma treatment to selectively dope the high-k gate dielectric material in the NMOS region with a dopant impurity while the high-k gate dielectric in the PMOS region is substantially free of the dopant impurity.Type: ApplicationFiled: October 29, 2007Publication date: April 30, 2009Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Joshua Tseng, Kang-Cheng Lin, Ji-Yi Yang, Kuo-Tai Huang, Ryan Chia-Jen Chen
-
Publication number: 20090094371Abstract: Two or more network traffic processors connected with the same LAN and WAN are identified as neighbors. Neighboring network traffic processors cooperate to overcome asymmetric routing, thereby ensuring that related sequences of network traffic are processed by the same network proxy. A network proxy can be included in a network traffic processor or as a standalone unit. A network traffic processor that intercepts a new connection initiation by a client assigns a network proxy to handle all messages associated with that connection. The network traffic processor conveys connection information to neighboring network traffic processors. The neighboring network traffic processors use the connection information to redirect network traffic associated with the connection to the assigned network proxy, thereby overcoming the effects of asymmetric routing. The assigned network proxy handles redirected network traffic in much the same way that it would handle network traffic received directly.Type: ApplicationFiled: December 9, 2008Publication date: April 9, 2009Applicant: Riverbed Technology, Inc.Inventors: Kand Ly, Joshua Tseng, Steve McCanne
-
Patent number: 7387973Abstract: A method for treating an inter-metal dielectric (IMD) layer to improve a mechanical strength and/or repair plasma etching damage including providing a low-K silicon oxide containing dielectric insulating layer; and carrying out a super critical fluid treatment of the low-K dielectric insulating layer including supercritical CO2 and a solvent including a silicon bond forming substituent having a bonding energy greater than a Si—H to replace at least a portion of the Si—H bonds with the silicon bond forming substituent.Type: GrantFiled: September 30, 2004Date of Patent: June 17, 2008Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Ching-Ya Wang, Joshua Tseng, Henry Lo
-
Patent number: 7332449Abstract: A method for forming a damascene structure by providing a single process solution for resist ashing while avoiding and repairing plasma etching damage as well as removing absorbed moisture in the dielectric layer, the method including providing a substrate comprising an uppermost photoresist layer and an opening extending through a thickness of an inter-metal dielectric (IMD) layer to expose an underlying metal region; and, carrying out at least one supercritical fluid treatment comprising supercritical CO2, a first co-solvent, and an additive selected from the group consisting of a metal corrosion inhibitor and a metal anti-oxidation agent to remove the uppermost photoresist layer, as well as including an optional dielectric insulating layer bond forming agent.Type: GrantFiled: September 30, 2005Date of Patent: February 19, 2008Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Ching-Ya Wang, Joshua Tseng, Henry Lo, Jean Wang
-
Publication number: 20070241455Abstract: A method for forming a damascene structure by providing a single process solution for resist ashing while avoiding and repairing plasma etching damage as well as removing absorbed moisture in the dielectric layer, the method including providing a substrate comprising an uppermost photoresist layer and an opening extending through a thickness of an inter-metal dielectric (IMD) layer to expose an underlying metal region; and, carrying out at least one supercritical fluid treatment comprising supercritical CO2, a first co-solvent, and an additive selected from the group consisting of a metal corrosion inhibitor and a metal anti-oxidation agent to remove the uppermost photoresist layer, as well as including an optional dielectric insulating layer bond forming agent.Type: ApplicationFiled: September 30, 2005Publication date: October 18, 2007Inventors: Ching-Ya Wang, Joshua Tseng, Henry Lo, Jean Wang