Abstract: A SAW filter includes a piezoelectric substrate of Lithium Niobate or optionally Lithium Tantalate having a thickness of at least twice an acoustic wavelength. The piezoelectric substrate is bonded to a surrogate substrate of a silicon material. The surrogate substrate is characterized by a resisitivity of at least 100 ohm-cm and an expansion coefficient compatible with the piezoelectric substrate. A catalytic bonding film between the piezoelectric substrate and the surrogate substrate is formed from a first catalytic bonding film deposited onto a surface of the piezoelectric substrate and a second catalytic bonding film deposited onto a surface of the surrogate substrate. The piezoelectric substrate is bonded to the surrogate substrate through a compression force sufficient for providing a bonding at a normal temperature.

Abstract: A SAW filter useful in cellular telephone communications includes SAW resonator elements provided in a series and parallel branches for forming a ladder filter network, and SAW resonator elements connected in parallel and provided in the series branch of the SAW filter for providing improved ESD protection to the SAW filter. The SAW filter is effectively used with an ESD protection circuit and a triplexer for receiving and separating low, high, and bandpass frequencies.