Patents by Inventor Jospeh Yudovsky

Jospeh Yudovsky has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ENHANCED SPATIAL ALD OF METALS THROUGH CONTROLLED PRECURSOR MIXING
    Publication number: 20210305052
    Abstract: Methods of depositing a film by atomic layer deposition are described. The methods comprise exposing a substrate surface to a first process condition comprising a first reactive gas and a second reactive gas and exposing the substrate surface to a second process condition comprising the second reactive gas. The first process condition comprises less than a full amount of the second reactive gas for a CVD process.
    Type: Application
    Filed: June 14, 2021
    Publication date: September 30, 2021
    Applicant: Applied Materials, Inc.
    Inventors: Kelvin Chan, Yihong Chen, Jared Ahmad Lee, Kevin Griffin, Srinivas Gandikota, Jospeh Yudovsky, Mandyam Sriram