Patents by Inventor Jozef Ferdinand Dymphna Verbeeck

Jozef Ferdinand Dymphna Verbeeck has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Illumination system and lithographic apparatus
    Patent number: 8885144
    Abstract: An illumination system having an array of individually controllable optical elements is disclosed, wherein each element is moveable between a plurality of orientations which may be selected in order to form desired illumination modes. The illumination system includes a controller to control orientation of one or more of the elements, the controller configured to apply force to the one or more elements which at least partially compensates for force applied to the one or more elements by a burst of radiation incident upon the one or more elements.
    Type: Grant
    Filed: May 24, 2011
    Date of Patent: November 11, 2014
    Assignee: ASML Netherlands B.V.
    Inventors: Bert Jan Claessens, Heine Melle Mulder, Paul Van Der Veen, Wilfred Edward Endendijk, Willem Jan Bouman, Bert Pieter Van Drieënhuizen, Jozef Ferdinand Dymphna Verbeeck, Marc Hendricus Margaretha Dassen, Thijs Johan Henry Hollink
  • Array element device control method and apparatus
    Patent number: 8089672
    Abstract: A method of controlling an element of an array of individually controllable elements. The method includes varying a frequency of a driving voltage with which the element is driven.
    Type: Grant
    Filed: December 19, 2008
    Date of Patent: January 3, 2012
    Assignee: ASML Netherlands B.V.
    Inventors: Patricius Aloysius Jacobus Tinnemans, Heine Melle Mulder, Marius Ravensbergen, Wilfred Edward Endendijk, Jozef Ferdinand Dymphna Verbeeck
  • ILLUMINATION SYSTEM AND LITHOGRAPHIC APPARATUS
    Publication number: 20110310372
    Abstract: An illumination system having an array of individually controllable optical elements is disclosed, wherein each element is moveable between a plurality of orientations which may be selected in order to form desired illumination modes. The illumination system includes a controller to control orientation of one or more of the elements, the controller configured to apply force to the one or more elements which at least partially compensates for force applied to the one or more elements by a burst of radiation incident upon the one or more elements.
    Type: Application
    Filed: May 24, 2011
    Publication date: December 22, 2011
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Bert Jan CLAESSENS, Heine Melle MULDER, Paul VAN DER VEEN, Wilfred Edward ENDENDIJK, Willem Jan BOUMAN, Bert Pieter VAN DRIEËNHUIZEN, Jozef Ferdinand Dymphna VERBEECK, Marc Hendricus Margaretha DASSEN, Thijs Johan Henry HOLLINK
  • Device control method and apparatus
    Publication number: 20090190197
    Abstract: A method of controlling an element of an array of individually controllable elements. The method includes varying a frequency of a driving voltage with which the element is driven.
    Type: Application
    Filed: December 19, 2008
    Publication date: July 30, 2009
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Patricius Aloysius Jacobus Tinnemans, Heine Melle Mulder, Marius Ravensbergen, Wilfred Edward Endendijk, Jozef Ferdinand Dymphna Verbeeck