Patents by Inventor Ju An

Ju An has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for removing surface deposits in the interior of a chemical vapor deposition reactor
    Publication number: 20080087642
    Abstract: Disclosed is a deposition apparatus assembly comprising a deposition chamber, a remote chamber outside the deposition chamber for producing a reactive species from a precursor gas mixture, an activation source adapted to deliver energy into said remote chamber, a conduit for flowing the reactive species from said remote chamber to said deposition chamber and a flow restricting device interposed between said conduit and said remote chamber wherein said flow restricting device is cooled by an external source.
    Type: Application
    Filed: September 25, 2007
    Publication date: April 17, 2008
    Inventors: Herbert Sawin, Bo Bai, Ju An
  • Method of using NF3 for removing surface deposits from the interior of chemical vapor deposition chambers
    Publication number: 20070107750
    Abstract: The present invention relates to a remote plasma cleaning method for removing surface deposits from a surface, such as the interior of a depositions chamber that is used in fabricating electronic devices. The process involves activating a gas stream comprising an oxygen source, NF3, and a fluorocarbon and contacting the activated gas mixture with surface deposits to remove the surface deposits.
    Type: Application
    Filed: November 7, 2006
    Publication date: May 17, 2007
    Inventors: Herbert Sawin, Bo Bai, Ju An
  • Processes for preparing quinolone carboxylate derivatives
    Publication number: 20060058528
    Abstract: Provided is a process for preparing quinolonecarboxylate derivatives under a mild condition in high yield, so as to be favorably applied to a large-scale mass production thereof.
    Type: Application
    Filed: December 19, 2003
    Publication date: March 16, 2006
    Applicant: Yuhan Corporation
    Inventors: Tai Lee, Nam Park, Ja Khoo, Seong Song, Ju An