Patents by Inventor Ju-Bae Kim

Ju-Bae Kim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Spinning apparatus
    Patent number: 7517431
    Abstract: In an embodiment, a spinning apparatus includes a spin table on which an object to be etched is placed, a rotation unit rotating the spin table, and a nozzle unit including a center nozzle, disposed on the central portion of the spin table, and at least one side nozzle, disposed on an edge of the spin table. Etching uniformity is improved over the conventional art because an etching chemical is distributed more evenly by the nozzle unit as the object to be etched is rotated. An embodiment may also include an exhaust to remove excess etching chemical.
    Type: Grant
    Filed: October 18, 2005
    Date of Patent: April 14, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Ho-Jin Choi, Yong-Mok Kim, Ju-Bae Kim, Byoung-Jin Lee
  • Spinning apparatus
    Publication number: 20060081338
    Abstract: In an embodiment, a spinning apparatus includes a spin table on which an object to be etched is placed, a rotation unit rotating the spin table, and a nozzle unit including a center nozzle, disposed on the central portion of the spin table, and at least one side nozzle, disposed on an edge of the spin table. Etching uniformity is improved over the conventional art because an etching chemical is distributed more evenly by the nozzle unit as the object to be etched is rotated. An embodiment may also include an exhaust to remove excess etching chemical.
    Type: Application
    Filed: October 18, 2005
    Publication date: April 20, 2006
    Inventors: Ho-Jin Choi, Yong-Mok Kim, Ju-Bae Kim, Byoung-Jin Lee