Abstract: A manufacturing apparatus for a semiconductor device, the manufacturing apparatus including a spin chuck configured to fix and rotate a wafer; a nozzle configured to spray a chemical toward the wafer; a lateral displacement sensor configured to measure a displacement variation to a lateral surface of the wafer while the spin chuck is rotating; and a controller configured to control a position of the nozzle by using the displacement variation while the spin chuck is rotating.

Abstract: A manufacturing apparatus for a semiconductor device, the manufacturing apparatus including a spin chuck configured to fix and rotate a wafer; a nozzle configured to spray a chemical toward the wafer; a lateral displacement sensor configured to measure a displacement variation to a lateral surface of the wafer while the spin chuck is being rotated; and a controller configured to control a position of the nozzle by using the displacement variation while the spin chuck is being rotated.

Abstract: Disclosed is a coolant control valve unit having a sealing structure, the control valve unit including: a rotary valve provided with a valve coolant passage formed from an inner surface to an outer surface of the rotary valve; a valve housing in which the rotary valve is rotatably provided; a fitting coupled to the valve housing, and having a fitting coolant passage; and a sealing unit provided between a front surface of the fitting and the outer surface of the rotary valve, wherein the sealing unit includes: a sealing ring being in contact with the outer surface of the rotary valve; and a rubber ring provided on the front surface of the fitting, and bringing the sealing ring into contact with the outer surface of the rotary valve, wherein the rubber ring has an X-shaped cross-section, with a front groove, a rear groove, an inner groove, and an outer groove.

Abstract: Disclosed is a coolant control valve unit having a sealing structure, the control valve unit including: a rotary valve provided with a valve coolant passage formed from an inner surface to an outer surface of the rotary valve; a valve housing in which the rotary valve is rotatably provided; a fitting coupled to the valve housing, and having a fitting coolant passage; and a sealing unit provided between a front surface of the fitting and the outer surface of the rotary valve, wherein the sealing unit includes: a sealing ring being in contact with the outer surface of the rotary valve; and a rubber ring provided on the front surface of the fitting, and bringing the sealing ring into contact with the outer surface of the rotary valve, wherein the rubber ring has an X-shaped cross-section, with a front groove, a rear groove, an inner groove, and an outer groove.

Abstract: A system and method for sharing Digital Living Network Alliance (DLNA) network information is provided. The system includes a first mobile terminal that collects information about a DLNA network having a radio radius in which the first mobile terminal is located, and transmits the information about the DLNA network to a web server. The web server manages the information about the DLNA network received from the first mobile terminal, and shares the information about the DLNA network with a second mobile terminal, which is located outside of the radio radius of the DLNA network, via an Internet connection.

Abstract: A method and apparatus for reducing power consumption of a mobile communication terminal operated at a slotted mode in a spread spectrum communication system such as a CDMA cellular mobile communication system. The mobile communication terminal reduces a paging channel monitoring time by entering a sleep mode or a wake-up mode at an arbitrary timing instead of a PN code rollover period, resulting in the increment of a standby time of the terminal.

Abstract: A method and apparatus for reducing power consumption of a mobile communication terminal operated at a slotted mode in a spread spectrum communication system such as a CDMA cellular mobile communication system. The mobile communication terminal reduces a paging channel monitoring time by entering a sleep mode or a wake-up mode at an arbitrary timing instead of a PN code rollover period, resulting in the increment of a standby time of the terminal.