Abstract: A coaxial probe structure, comprising: a support member, comprising a first connecting member; a connector, comprising a second connecting member; a coaxial probe, connecting with a connecting end of the coaxial probe to a bottom of the connector, and extending downwards from the bottom of the connector to a probe tip, and an included angle formed at a junction of the probe tip and the connecting end; and an elastic body connecting the support member with the junction of the connecting end and the probe tip of the coaxial probe.

Abstract: A prober and methods using the prober for positioning a probe tip and for obtaining contact data of a probe and a polishing sheet. The prober comprises a probe card holder for holding a probe card having at least one probe, and each of the at least one probe having a probe tip; a force sensor, provided below the probe card holder, and having a sensing surface for being in contact with the probe tip; and at least one moving device, for moving the force sensor and the probe relatively in the direction toward each other, wherein, as the probe tip being in contact with the sensing surface, the force sensor sensing a force and producing a signal, so as to stop moving the force sensor and the probe relatively.

Abstract: A coaxial probe structure, comprising: a support member, comprising a first connecting member; a connector, comprising a second connecting member; a coaxial probe, connecting with a connecting end of the coaxial probe to a bottom of the connector, and extending downwards from the bottom of the connector to a probe tip, and an included angle formed at a junction of the probe tip and the connecting end; and an elastic body connecting the support member with the junction of the connecting end and the probe tip of the coaxial probe.