Patents by Inventor Ju Mi YOO

Ju Mi YOO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate treating apparatus, drive assembly, and drive member controlling method
    Patent number: 9915261
    Abstract: Provided is a substrate treating apparatus. The substrate treating apparatus includes: a transfer chamber conveying a substrate; a process chamber disposed adjacent to the transfer chamber and performing a treating process o the substrate; and a drive assembly supplying a power by which a component of the transfer chamber or the process chamber operates, wherein the drive assembly includes: a cylinder connected to pipes; a piston disposed to be movable inside the cylinder and connected to the component by a drive shaft; and a pipe control unit automatically adjusting a moving speed of the piston.
    Type: Grant
    Filed: October 30, 2014
    Date of Patent: March 13, 2018
    Assignee: Semes Co., Ltd.
    Inventors: Jin Ho Choi, Ju Mi Yoo
  • SUBSTRATE TREATING APPARATUS, DRIVE ASSEMBLY, AND DRIVE MEMBER CONTROLLING METHOD
    Publication number: 20150117987
    Abstract: Provided is a substrate treating apparatus. The substrate treating apparatus includes: a transfer chamber conveying a substrate; a process chamber disposed adjacent to the transfer chamber and performing a treating process o the substrate; and a drive assembly supplying a power by which a component of the transfer chamber or the process chamber operates, wherein the drive assembly includes: a cylinder connected to pipes; a piston disposed to be movable inside the cylinder and connected to the component by a drive shaft; and a pipe control unit automatically adjusting a moving speed of the piston.
    Type: Application
    Filed: October 30, 2014
    Publication date: April 30, 2015
    Inventors: Jin Ho CHOI, Ju Mi YOO