Abstract: An apparatus for processing a substrate includes a first processing unit configured to have a first processing container having a first inner space and a first support unit supporting and rotating the substrate in the first inner space; a second processing unit configured to have a second processing container having a second inner space and a second support unit supporting and rotating the substrate in the second inner space; an exhaust unit configured to exhaust the first and the second inner space; a first exhaust pipe configured to have a first exhaust port for introducing atmosphere of the first inner space and exhaust the atmosphere introduced through the first exhaust port to the integrated duct; and a second exhaust pipe configured to have a second exhaust port for introducing atmosphere of the second inner space and exhaust the atmosphere introduced through the second exhaust port to the integrated duct.

Abstract: Provided is a substrate processing apparatus that processes a semiconductor substrate using a laser and a semiconductor manufacturing equipment including the same. The substrate processing apparatus comprises a chamber for providing a space where a substrate is processed; a support module disposed within the chamber and for supporting the substrate; and a laser signal generation module disposed in the chamber and for transmitting a laser signal onto the substrate to heat-treat the substrate, wherein the laser signal generation module heat-treats the substrate including a photoresist layer.

Abstract: Various example embodiments provide a transfer hand for transferring a substrate. The transfer hand for transferring the substrate comprises: a body; and a vacuum assembly installed in the body and providing decompression to the bottom surface of a substrate to support the substrate at the upper part of the body; wherein the vacuum assembly comprises: an vacuum pad with conductivity contacting the substrate; and a sealing member provided between the vacuum pad and the body, the sealing member electrically connected to the vacuum pad; wherein the sealing member is grounded.

Abstract: An apparatus for treating a substrate, the apparatus comprising: a treating container having an inner space; a support unit supporting and rotating the substrate in the inner space; and an exhaust unit exhausting an air flow in the inner space, wherein the treating container includes an outer cup providing the inner space; and an inner cup disposed at the inner space and spaced apart from the outer cup, and wherein the outer cup has a protrusion at a side wall thereof.

Abstract: Provided is a method for treating a substrate. The method for treating the substrate may include heating a substrate formed with a plurality of thin film layers including a photoresist layer formed on a surface, and irradiating light to a first thin film layer including a metal among the plurality of thin film layers to heat the first thin film layer.

Abstract: The inventive concept provides a substrate treating apparatus. According to the inventive concept, the substrate treating apparatus treats the substrate by supplying a treating liquid on a rotating substrate. The exhaust unit exhausting an atmosphere of an inner space comprises: a first exhaust port introducing the atmosphere of the inner space, a first exhaust line provided to exhaust an atmosphere introduced through the first exhaust port in a first direction and a second exhaust port introducing the atmosphere of the inner space, and a second exhaust line provided to exhaust an atmosphere introduced through the second exhaust port in a second direction. The controller controls the support unit so an exhaust direction inside of the first exhaust line and the second exhaust line become a forward direction with respect to a rotation direction of the substrate.

Abstract: An apparatus for processing a substrate includes a first processing unit configured to have a first processing container having a first inner space and a first support unit supporting and rotating the substrate in the first inner space; a second processing unit configured to have a second processing container having a second inner space and a second support unit supporting and rotating the substrate in the second inner space; an exhaust unit configured to exhaust the first and the second inner space; a first exhaust pipe configured to have a first exhaust port for introducing atmosphere of the first inner space and exhaust the atmosphere introduced through the first exhaust port to the integrated duct; and a second exhaust pipe configured to have a second exhaust port for introducing atmosphere of the second inner space and exhaust the atmosphere introduced through the second exhaust port to the integrated duct.

Abstract: An apparatus for treating a substrate, the apparatus comprising: a treating container having an inner space; a support unit supporting and rotating the substrate in the inner space; and an exhaust unit exhausting an air flow in the inner space, wherein the treating container includes an outer cup providing the inner space; and an inner cup disposed at the inner space and spaced apart from the outer cup, and wherein the outer cup has a protrusion at a side wall thereof.

Abstract: The inventive concept provides a transfer hand for transferring a substrate. The transfer hand for transferring the substrate comprises: a body; and a vacuuma assembly installed in the body and providing decompression to the bottom surface of a substrate to support the substrate at the upper part of the body; wherein the vacuum assembly comprises: an vacuum pad with conductivity contacting the substrate; and a sealing member provided between the vacuum pad and the body, the sealing member electrically connected to the vacuum pad; wherein the sealing member is grounded.

Abstract: A method of controlling an inter-vehicle communication system includes: monitoring a current situation based on at least one piece of input information; determining whether the current situation corresponds to an emergency condition; preparing a message corresponding to the emergency condition upon determining that the current situation corresponds to the emergency condition; and broadcasting the prepared message to at least one neighboring vehicle.

Abstract: Disclosed is a method of monitoring a problem related to a railroad car by a railroad car monitoring apparatus, the method including: selecting a monitoring target of the railroad car; selecting a diagnosis reference related to the monitoring target; measuring travelling data related to the monitoring target while the railroad car travels; drawing a result value of the characteristic function according to the travelling data and comparing each of the travelling data with a reference value in a normal state and determining whether a defect is generated in the monitoring target.

Abstract: A color generation device 1000 according to the present invention has a light source 8, and also has a linear polarizing means 10, a first birefringence medium 30a and a second birefringence medium 30b attached to each other in sequence in front of the light source 8. A display means 500 is provided which is distanced from the linear polarizing means 10, the first birefringence medium 30a and a second birefringence medium 30b. The first birefringence means 30a is arranged for the principal axes thereof to be at angle of 45° or ?45° with respect to the polarization direction a1 of the linear polarizing means 10 and the second birefringence medium 30b is arranged for the principal axes thereof to be the same as or perpendicular to polarization direction a1 of the linear polarizing means 10 and quarter wave plate is used therefor.

Abstract: A method of controlling an inter-vehicle communication system includes: monitoring a current situation based on at least one piece of input information; determining whether the current situation corresponds to an emergency condition; preparing a message corresponding to the emergency condition upon determining that the current situation corresponds to the emergency condition; and broadcasting the prepared message to at least one neighboring vehicle.

Abstract: A vehicle capable of outputting information to an occupant therein using variable priority order and a method for performing the same are provided. A method of outputting information of a vehicle may include: recognizing a current situation on the basis of at least one piece of input information; determining a function to which a weight is applied in the recognized situation among a plurality of functions of the vehicle; resetting priority orders for the plurality of functions of the vehicle on the basis of the determined function to which a weight is applied; and determining whether output information about each of at least one event is output on the basis of the reset priority orders.

Abstract: A method of controlling a wireless communication device used in a vehicle is disclosed. The method includes (1) monitoring strength of signals received via a plurality of receivers and power consumption of signal amplifiers included in the plurality of receivers, (2) determining a level of a localization service based on a location of the vehicle. The method further comprises (3) adjusting operation of at least one of the plurality of receivers according to the level of the localization service and a level of available power in the vehicle.

Abstract: Disclosed herein is a method of dynamically modifying a boundary region in provision of an Internet of Things (IoT) service according to entry into and exit from a predetermined boundary region based on vehicle location. A method of controlling a boundary based service provision system includes setting a boundary around a destination according to a predetermined criterion, acquiring an entry direction of a vehicle and an estimated time of arrival (ETA) and an actual time required in the entry direction upon sensing that the vehicle passes through the boundary toward the destination, and resetting the boundary in the entry direction when a difference between the ETA and the actual time required is equal to or greater than a predetermined value.

Abstract: Disclosed is a method of monitoring a problem related to a railroad car by a railroad car monitoring apparatus, the method including: selecting a monitoring target of the railroad car; selecting a diagnosis reference related to the monitoring target; measuring travelling data related to the monitoring target while the railroad car travels; drawing a result value of the characteristic function according to the travelling data and comparing each of the travelling data with a reference value in a normal state and determining whether a defect is generated in the monitoring target.