Abstract: A cathode for a lithium secondary battery includes lithium metal oxide particles having CM defined by D*(EIT/HIT)/[(Li/Me)2] of of 70 or more. D is an average particle diameter value calculated in micrometers after measuring diameters of particles with a diameter of 4 ?m or more in the lithium metal oxide particles included in a scanning electron microscope (SEM) image showing a thickness*width cross-section of the cathode active material layer. EIT is a modulus value of the lithium metal oxide particles measured by a nano indentation method. HIT is a hardness value of the lithium metal oxide particles measured by a nano indentation method. Li/Me is a molar ratio of lithium to metals other than lithium in the lithium metal oxide particles.

Abstract: A cathode active material precursor for a lithium secondary battery includes nickel and at least one metal except for nickel. The cathode active material precursor includes primary particles having a major axis length of 500 nm or less and an aspect ratio in a range from 1.0 to 3.0. A volume ratio of micropores having a pore diameter of 2 nm or less relative to a total pore volume is 1.4% or less.

Abstract: A lithium secondary battery includes a cathode including a cathode active material layer that includes a plurality of lithium metal oxide particles, each lithium metal oxide particle having a form of a secondary particle including a plurality of aggregated primary particles, an anode facing the cathode, and an electrolyte solution containing a lithium salt and an organic solvent. The organic solvent includes a compound represented by a specific chemical formula. The plurality of primary particles include rod-shape particles having an aspect ratio of 1.5 to 5. The rod-shape particles have a major axis oriented in a direction from a center of the lithium metal oxide particle to a surface of the lithium metal oxide particle.

Abstract: A cathode for a lithium secondary battery includes a cathode current collector, and a cathode active material layer satisfying a specific formula formed on the cathode current collector. The cathode active material layer includes lithium metal oxide particles that have a single particle shape, and a single crystalline structure or a poly-crystalline structure including two or more single crystals. A lithium secondary battery including the cathode, and a method of preparing a cathode active material are also provided.

Abstract: Provided is a wafer exposure apparatus used in a semiconductor device manufacturing process, the exposure apparatus including: a reflective mirror for reflecting light provided from a light source; an optical path changer for changing a path of the light provided from the reflective mirror; first mirrors installed at both sides of the optical path changer to change the path of the light; second mirrors installed at both sides of a material to change the path of the light; and third mirrors installed at both sides of a mask to enter the light reflected by the first mirrors to the mask and to enter the light passed through the mask into the second mirrors, whereby it is possible to continuously expose one surface, both surfaces or a specific surface of a wafer in a state that the wafer is once aligned.

Abstract: Provided is a wafer exposure apparatus used in a semiconductor device manufacturing process, the exposure apparatus including: a reflective mirror for reflecting light provided from a light source; an optical path changer for changing a path of the light provided from the reflective mirror; first mirrors installed at both sides of the optical path changer to change the path of the light; second mirrors installed at both sides of a material to change the path of the light; and third mirrors installed at both sides of a mask to enter the light reflected by the first mirrors to the mask and to enter the light passed through the mask into the second mirrors, whereby it is possible to continuously expose one surface, both surfaces or a specific surface of a wafer in a state that the wafer is once aligned.