Patents by Inventor Ju YAO

Ju YAO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240145380
    Abstract: In some embodiments, the present disclosure relates to an integrated chip that includes a first interconnect dielectric layer arranged over a substrate. An interconnect wire extends through the first interconnect dielectric layer, and a barrier structure is arranged directly over the interconnect wire. The integrated chip further includes an etch stop layer arranged over the barrier structure and surrounds outer sidewalls of the barrier structure. A second interconnect dielectric layer is arranged over the etch stop layer, and an interconnect via extends through the second interconnect dielectric layer, the etch stop layer, and the barrier structure to contact the interconnect wire.
    Type: Application
    Filed: January 5, 2024
    Publication date: May 2, 2024
    Inventors: Hsin-Chieh Yao, Chung-Ju Lee, Chih Wei Lu, Hsi-Wen Tien, Wei-Hao Liao, Yu-Teng Dai
  • Patent number: 11972975
    Abstract: A method of forming a semiconductor device structure is provided. The method includes forming a masking structure with first openings over a semiconductor substrate and correspondingly forming metal layers in the first openings. The method also includes recessing the masking structure to form second openings between the metal layers and forming a sacrificial layer surrounded by a first liner in each of the second openings. In addition, after forming a second liner over the sacrificial layer in each of the second openings, the method includes removing the sacrificial layer in each of the second openings to form a plurality of air gaps therefrom.
    Type: Grant
    Filed: June 24, 2021
    Date of Patent: April 30, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsi-Wen Tien, Wei-Hao Liao, Yu-Teng Dai, Hsin-Chieh Yao, Chih-Wei Lu, Chung-Ju Lee, Shau-Lin Shue
  • Patent number: 11942364
    Abstract: In some embodiments, the present disclosure relates to a method of forming an interconnect. The method includes forming an etch stop layer (ESL) over a lower conductive structure and forming one or more dielectric layers over the ESL. A first patterning process is performed on the one or more dielectric layers to form interconnect opening and a second patterning process is performed on the one or more dielectric layers to increase a depth of the interconnect opening and expose an upper surface of the ESL. A protective layer is selectively formed on sidewalls of the one or more dielectric layers forming the interconnect opening. A third patterning process is performed to remove portions of the ESL that are uncovered by the one or more dielectric layers and the protective layer and to expose the lower conductive structure. A conductive material is formed within the interconnect opening.
    Type: Grant
    Filed: July 20, 2022
    Date of Patent: March 26, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsi-Wen Tien, Chung-Ju Lee, Chih Wei Lu, Hsin-Chieh Yao, Yu-Teng Dai, Wei-Hao Liao
  • Publication number: 20240088022
    Abstract: Some embodiments relate to an integrated chip including a plurality of conductive structures over a substrate. A first dielectric layer is disposed laterally between the conductive structures. A spacer structure is disposed between the first dielectric layer and the plurality of conductive structures. An etch stop layer overlies the plurality of conductive structures. The etch stop layer is disposed on upper surfaces of the spacer structure and the first dielectric layer.
    Type: Application
    Filed: November 17, 2023
    Publication date: March 14, 2024
    Inventors: Yu-Teng Dai, Chung-Ju Lee, Chih Wei Lu, Hsin-Chieh Yao, Hsi-Wen Tien, Wei-Hao Liao
  • Publication number: 20240087644
    Abstract: A forming operation of resistive memory device is provided. The operation includes: applying a pre-forming gate voltage and a pre-forming bit line voltage to a target memory cell; performing a dense switching forming operation, wherein the dense switching forming operation includes alternately performing dense set operations and dense reset operations on the target memory cell, wherein the dense set operation includes applying a dense switching gate voltage and a dense set bit line voltage; and performing a normal set operation on the target memory cell, wherein the normal set operation includes applying a normal set gate voltage and a normal set bit line voltage to the target memory cell, the normal set gate voltage is greater than the pre-forming gate voltage and the dense switching gate voltage, and the normal set bit line voltage is less than the pre-forming bit line voltage and the dense set bit line voltage.
    Type: Application
    Filed: August 29, 2023
    Publication date: March 14, 2024
    Applicant: Winbond Electronics Corp.
    Inventors: I-Hsien Tseng, Lung-Chi Cheng, Ju-Chieh Cheng, Jun-Yao Huang, Ping-Kun Wang
  • Patent number: 11923293
    Abstract: In some embodiments, the present disclosure relates to an integrated chip that includes a first interconnect dielectric layer arranged over a substrate. An interconnect wire extends through the first interconnect dielectric layer, and a barrier structure is arranged directly over the interconnect wire. The integrated chip further includes an etch stop layer arranged over the barrier structure and surrounds outer sidewalls of the barrier structure. A second interconnect dielectric layer is arranged over the etch stop layer, and an interconnect via extends through the second interconnect dielectric layer, the etch stop layer, and the barrier structure to contact the interconnect wire.
    Type: Grant
    Filed: July 8, 2021
    Date of Patent: March 5, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Hsin-Chieh Yao, Chung-Ju Lee, Chih Wei Lu, Hsi-Wen Tien, Wei-Hao Liao, Yu-Teng Dai
  • Publication number: 20200388013
    Abstract: An inverse matrix iterative deconvolution method for spectral resolution enhancement comprises the following steps: step 1, sequence convolution and convolution square matrices; step 2, cumulative multiplication of convolution square matrices and convolution kernel function peak broadening; and step 3, peak resolution enhancement. The invention achieves the purpose of narrowing the peak width by multiplying primitive functions by deconvolution matrices. Further, the invention provides a method for constructing a deconvolution identity matrix to achieve the deconvolution effect with an expected precision. The calculation process is fast and controllable with stable and accurate results, and the application range is wide. The method can be used for resolution enhancement of molecular spectra such as Raman and infrared spectra, as well as other spectra with symmetrical peak patterns such as mass spectra, nuclear magnetic resonance, XRD and XRF.
    Type: Application
    Filed: May 17, 2019
    Publication date: December 10, 2020
    Applicant: GUANGXI UNIVERSITY OF SCIENCE AND TECHNOLOGY
    Inventors: ZhiXiang YAO, Ju YAO, Hui SU, Liu LIU
  • Publication number: 20190054032
    Abstract: There are provided a pharmaceutical composition, a preparation method thereof, and an application of same. The pharmaceutical composition includes an active ingredient, a polymer, and a surfactant. The surfactant includes a bile salt. The pharmaceutical composition is prepared as a nanoparticle.
    Type: Application
    Filed: March 2, 2017
    Publication date: February 21, 2019
    Inventors: Xiaomin ZHANG, Yingxin ZHANG, Ju YAO, Bo YU
  • Publication number: 20180369389
    Abstract: The present disclosure relates to a novel polymeric nano-formulation of a composition comprising an active ingredient and a polyethylene glycol (PEG)-polybutylene glycol (PBG) copolymer. The present disclosure also relates to a method of preparing such a composition and its use in the preparation of a medicament.
    Type: Application
    Filed: November 9, 2016
    Publication date: December 27, 2018
    Inventors: Bo YU, Gaer YU, Xiaomin ZHANG, Yingxin ZHANG, Ju YAO