Patents by Inventor Ju Yeon KWON

Ju Yeon KWON has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SEMICONDUCTOR PROCESS CHAMBER
    Publication number: 20230392260
    Abstract: Provided is a semiconductor process chamber including a chamber configured to accommodate a wafer, and a shower head on an upper side of the chamber and including a plurality of nozzles, wherein the shower head includes a gas supplier configured to supply gas to the shower head, and wherein the gas supplier includes a gas line, a heating jacket adjacent to the gas line, and a heating jacket cover adjacent to the heating jacket.
    Type: Application
    Filed: June 2, 2023
    Publication date: December 7, 2023
    Applicant: HANWHA CORPORATION
    Inventors: Dong Won SEO, Ju Yeon KWON, Yu Ri SHIN