Patents by Inventor Juan B. Tuscano

Juan B. Tuscano has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20030019428
    Abstract: A processing chamber is adapted to perform a deposition process on a substrate. The chamber includes a pedestal adapted to hold a substrate during deposition and a gas mixing and distribution assembly mounted above the pedestal. The gas mixing and distribution assembly includes a face plate, a dispersion plate mounted above the face plate, and a mixing fixture mounted above the dispersion plate. The face plate is adapted to present an emissivity invariant configuration to the pedestal. The mixing fixture includes a mixing chamber to which a process gas is flowed and an outer chamber surrounding the mixing chamber. The processing chamber further includes an enclosure and a liner installed inside the enclosure and surrounding the pedestal. The liner defines a gap between the liner and the enclosure. The gap has a minimum width adjacent an exhaust port and a maximum width at a point that is diametrically opposite the exhaust port.
    Type: Application
    Filed: April 26, 2002
    Publication date: January 30, 2003
    Inventors: Vincent W. Ku, Anzhong Chang, Anh N. Nguyen, Ming Xi, Xiaoxiong Yuan, Juan B. Tuscano, Lawrence C. Lei, Seshadri Ganguli, Michael Yang, Chen-An Chen, Ling Chen