Patents by Inventor Juan Diego ARIAS ESPINOZA

Juan Diego ARIAS ESPINOZA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for manufacturing a pellicle, and a pellicle
    Patent number: 10365558
    Abstract: An apparatus for manufacturing a pellicle, the apparatus comprising: a stressing assembly for stressing a film; and a substrate support for supporting a substrate, the stressing assembly and the substrate support being capable of relative movement so as to bring the substrate into contact with the film when the film is stressed.
    Type: Grant
    Filed: November 19, 2014
    Date of Patent: July 30, 2019
    Assignee: ASML Netherlands B.V.
    Inventors: Maarten Mathijs Marinus Jansen, Juan Diego Arias Espinoza, Johannes Peterus Henricus De Kuster
  • Lithographic apparatus
    Patent number: 10139725
    Abstract: The present invention is concerned with an apparatus for shielding a reticle for EUV lithography. The apparatus comprises a pellicle, and at least one actuator in communication with the pellicle, the actuator being configured to induce, in use, movement of the pellicle with respect to a reticle.
    Type: Grant
    Filed: March 4, 2014
    Date of Patent: November 27, 2018
    Assignee: ASML Netherlands B.V.
    Inventors: James Norman Wiley, Juan Diego Arias Espinoza, Derk Servatius Gertruda Brouns, Laurentius Cornelius De Winter, Florian Didier Albin Dhalluin, Pedro Julian Rizo Diago, Luigi Scaccabarozzi
  • Fluorescence detector system for detection of an aromatic hydrocarbon
    Patent number: 9829473
    Abstract: The invention relates to a detector system suitable for detection of an aromatic hydrocarbon, comprising an organic polymeric sensor material that is permeable to the aromatic hydrocarbon, the sensor material comprising a molecular probe selected from the group of methanatoboron moieties. Further, the invention relates to the use of a detector system according to the invention for the detection of an aromatic hydrocarbon, preferably an aromatic hydrocarbon selected from the group of benzene, toluene and xylene.
    Type: Grant
    Filed: December 13, 2013
    Date of Patent: November 28, 2017
    Assignee: NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO
    Inventors: Juan Diego Arias Espinoza, Edsger Constant Pieter Smits
  • Apparatus and Method for Manufacturing a Pellicle, and a Pellicle
    Publication number: 20160313637
    Abstract: An apparatus for manufacturing a pellicle, the apparatus comprising: a stressing assembly for stressing a film; and a substrate support for supporting a substrate, the stressing assembly and the substrate support being capable of relative movement so as to bring the substrate into contact with the film when the film is stressed.
    Type: Application
    Filed: November 19, 2014
    Publication date: October 27, 2016
    Applicant: ASML Netherlands B.V.
    Inventors: Maarten Mathijs Marinus Jansen, Juan Diego Arias Espinoza, Johannes Peterus Henricus De Kuster
  • Lithographic Apparatus
    Publication number: 20160033860
    Abstract: The present invention is concerned with an apparatus for shielding a reticle for EUV lithography. The apparatus comprises a pellicle, and at least one actuator in communication with the pellicle, the actuator being configured to induce, in use, movement of the pellicle with respect to a reticle.
    Type: Application
    Filed: March 4, 2014
    Publication date: February 4, 2016
    Applicant: ASML Netherlands B.V.
    Inventors: James Norman WILEY, Juan Diego ARIAS ESPINOZA, Derk Servatius Gertruda BROUNS, Laurentius Cornelius DE WINTER, Florian Didier Albin DHALLUIN, Pedro Julian RIZO DIAGO, Luigi SCACCABAROZZI
  • FLUORESCENCE DETECTOR SYSTEM FOR DETECTION OF AN AROMATIC HYDROCARBON
    Publication number: 20150330959
    Abstract: The invention relates to a detector system suitable for detection of an aromatic hydrocarbon, comprising an organic polymeric sensor material that is permeable to the aromatic hydrocarbon, the sensor material comprising a molecular probe selected from the group of methanatoboron moieties. Further, the invention relates to the use of a detector system according to the invention for the detection of an aromatic hydrocarbon, preferably an aromatic hydrocarbon selected from the group of benzene, toluene and xylene.
    Type: Application
    Filed: December 13, 2013
    Publication date: November 19, 2015
    Inventors: Juan Diego ARIAS ESPINOZA, Edsger Constant Pieter SMITS