Patents by Inventor Juan Jose Gonzales

Juan Jose Gonzales has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8344559
    Abstract: Improved power distribution architectures for the uniform delivery of single frequency RF power to plasma chambers are disclosed. The architectures include feeding into multiple points across a single large-area electrode, multiple electrodes driving a common plasma discharge as well as multiple coils driving a common plasma discharge. The time-averaged electromagnetic field distribution may be controlled using an array of generator and match (delivery) systems, one of which may be capable of absorbing net power and presenting controlled impedance to the plasma load. In variations, an M+N port network (with M the number of generators and N the number of feed points on the electrode) may be implemented to level the power required from each generator while maintaining a desired field strength distribution.
    Type: Grant
    Filed: May 5, 2009
    Date of Patent: January 1, 2013
    Assignee: Advanced Energy Industries, Inc.
    Inventors: Gideon Van Zyl, Juan Jose Gonzales
  • Publication number: 20100283395
    Abstract: Improved power distribution architectures for the uniform delivery of single frequency RF power to plasma chambers are disclosed. The architectures include feeding into multiple points across a single large-area electrode, multiple electrodes driving a common plasma discharge as well as multiple coils driving a common plasma discharge. The time-averaged electromagnetic field distribution may be controlled using an array of generator and match (delivery) systems, one of which may be capable of absorbing net power and presenting controlled impedance to the plasma load. In variations, an M+N port network (with M the number of generators and N the number of feed points on the electrode) may be implemented to level the power required from each generator while maintaining a desired field strength distribution.
    Type: Application
    Filed: May 5, 2009
    Publication date: November 11, 2010
    Inventors: Gideon Van Zyl, Juan Jose Gonzales