Abstract: The disclosed technology generally relates to semiconductor devices, and more particularly to a vertical three-dimensional semiconductor device and a method for manufacturing such a device. In one aspect, the vertical three-dimensional semiconductor device has a source layer formed over a substrate. A horizontal stack of alternating electrically isolating layers and electrically conductive gate layers are formed over the source layer, wherein one of the electrically isolating layers contacts the source layer. A vertical channel structure extends vertically through the horizontal stack of alternating layers. A drain is formed over the horizontal stack of alternating layers and over the vertical channel structure. The source layer is configured to inject charge carriers into the vertical channel structure, and the metal drain is configured to extract charge carriers from the vertical channel structure.

Abstract: The disclosed technology generally relates to semiconductor devices, and more particularly to a vertical three-dimensional semiconductor device and a method for manufacturing such a device. In one aspect, the vertical three-dimensional semiconductor device has a source layer formed over a substrate. A horizontal stack of alternating electrically isolating layers and electrically conductive gate layers are formed over the source layer, wherein one of the electrically isolating layers contacts the source layer. A vertical channel structure extends vertically through the horizontal stack of alternating layers. A drain is formed over the horizontal stack of alternating layers and over the vertical channel structure. The source layer is configured to inject charge carriers into the vertical channel structure, and the metal drain is configured to extract charge carriers from the vertical channel structure.

Abstract: The disclosed technology generally relates to memory devices, and more particularly to memory devices having an intergate dielectric stack comprising multiple high k dielectric materials. In one aspect, a planar non-volatile memory device comprises a hybrid floating gate structure separated from an inter-gate dielectric structure by a first interfacial layer which is designed to be electrically transparent so as not to affect the program saturation of the device. The inter-gate structure comprises a stack of three layers having a high-k/low-k/high-k configuration and the interfacial layer has a higher k-value than its adjacent high-k layer in the inter-gate dielectric structure. A method of making such a non-volatile memory device is also described.

Abstract: The disclosed technology generally relates to memory devices, and more particularly to memory devices having an intergate dielectric stack comprising multiple high k dielectric materials. In one aspect, a planar non-volatile memory device comprises a hybrid floating gate structure separated from an inter-gate dielectric structure by a first interfacial layer which is designed to be electrically transparent so as not to affect the program saturation of the device. The inter-gate structure comprises a stack of three layers having a high-k/low-k/high-k configuration and the interfacial layer has a higher k-value than its adjacent high-k layer in the inter-gate dielectric structure. A method of making such a non-volatile memory device is also described.

Abstract: A method for manufacturing a resistive switching memory device comprises providing a substrate comprising an electrical contact, providing on the substrate a dielectric layer comprising a trench exposing the electrical contact, and providing in the trench at least the bottom electrode and the resistive switching element of the resistive memory device. The method may furthermore comprise providing a top electrode at least on or in the trench, in contact with the resistive switching element. The present invention also provides corresponding resistive switching memory devices.

Abstract: A method for manufacturing a resistive switching memory device comprises providing a substrate comprising an electrical contact, providing on the substrate a dielectric layer comprising a trench exposing the electrical contact, and providing in the trench at least the bottom electrode and the resistive switching element of the resistive memory device. The method may furthermore comprise providing a top electrode at least on or in the trench, in contact with the resistive switching element. The present invention also provides corresponding resistive switching memory devices.

Abstract: The present invention discloses a vertical phase-change-memory (PCM) cell, comprising a stack of a bottom electrode (5) contacting a first layer of phase change material (14), a dielectric layer (12) having an opening (13), a second layer of phase change material (6) in contact with the first layer of phase change material through the opening in the dielectric layer and a top electrode (7) contacting this second layer of phase change material.

Abstract: The present invention discloses a vertical phase-change-memory (PCM) cell, comprising a stack of a bottom electrode (5) contacting a first layer of phase change material (14), a dielectric layer (12) having an opening (13), a second layer of phase change material (6) in contact with the first layer of phase change material through the opening in the dielectric layer and a top electrode (7) contacting this second layer of phase change material.