Patents by Inventor Juergen August Foerstner

Juergen August Foerstner has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor structure having a monocrystalline member overlying a cavity in a semiconductor substrate and process therefor
    Patent number: 6013933
    Abstract: A process for forming a sensor (10) such as an accelerometer includes the steps of forming an epitaxial layer (14) on a semiconductor substrate (12), patterning a portion of the epitaxial layer to provide a monocrystalline finger (20,22), wherein the finger has a height (43) at least twice its width (44), and forming a cavity (40) under at least a portion of the finger to expose a bottom surface (38) of the finger using an etchant with an etch selectivity for the semiconductor substrate relative to the epitaxial layer of greater than about 10:1. The distance (42) from the bottom of the cavity to the bottom surface of the member is greater than about 5 microns. The accelerometer is useful for lateral acceleration sensing and is built in bulk silicon at the surface of the substrate.
    Type: Grant
    Filed: May 30, 1997
    Date of Patent: January 11, 2000
    Assignee: Motorola, Inc.
    Inventors: Juergen August Foerstner, Henry Guenther Hughes, Amir Raza Mirza