Abstract: A high frequency oscillator with operating frequencies of 30 MHz or greater having an etched quartz thickness shear resonator with resonating means. The resonator has a support structure and a much thinner resonating membrane cantilevered from the support structure. In a preferred embodiment, the design of the support structure is such that a sloped edge is provided between the support structure and the membrane, thus facilitating the application of electrode resonating means extending from the support structure to the membrane. In another preferred embodiment, a plurality of resonators having a support structure and cantilevered membrane with at least one sloped edge are formed on a quartz wafer in a manner similar to semiconductor chip fabrication.

Abstract: A process for making a plurality of quartz thickness shear resonators with resonating means for use in high frequency oscillators with operating frequencies of 30 MHz or greater. The invention includes grinding a single crystal quartz wafer to achieve a highly uniform thickness, thus enhancing uniformity of the resonators produced. The invention also includes etching the quartz wafer to form a plurality of resonators, each having a support structure and a much thinner etched resonating membrane cantilevered at the support structure. In addition, the design of the support structure is such that a sloped edge occurs during membrane etching between the support structure and the membrane, thus facilitating the application of electrodes extending from the support structure to the membrane. Yet another aspect of the invention is to perform a fine-tune etching during the formation and tuning of the resonating membranes, thus further enhancing the uniformity of the resonator frequencies across the wafer.

Abstract: A vibratory angular rate sensor system preferably consists of a Z-cut quartz plate forming a mounting frame with a rectangular opening. Within the opening are mounted two pairs of tines. Each pair of tines is parallel to each other, one pair forming the drive tines and the other pair the output tines. Each corresponding set of two tines is disposed along the same axis having a common stem or base. The tines are secured by four bridges integral with the frame and connected to the stem. The arrangement is such that the pair of input tines vibrates in opposition to each other, while the pair of output tines vibrates with one tine going up while the other moves downwardly. As a result, the angular rate sensors drive frequency and the structural torque frequency are unequal. Therefore large displacements of the stem are unnecessary.

Abstract: A vibratory angular rate sensing system may have one pair of tines forming an angle of about 60 degrees, resulting from the crystalline orientation of the Z-cut quartz wafer of the system. In one configuration each of the tines is provided with a mass offset from the axis of the associated tine, a pivot extends through the plane of symmetry of the tines and may be connected to a dummy reaction mass. The resonant system is suspended from a mounting frame by a pair of suspension bridges. A second embodiment of the invention features two groups of tines, each group including two pairs of tines arranged in the form of a cross. Again, an offset mass is associated with the free end of each tine and each group of tines is secured to its frame by a suspension bridge.

Abstract: A vibratory angular rate sensor system preferably consists of a Z-cut quartz plate forming a mounting frame with a rectangular opening. Within the opening are mounted two pairs of tines. Each pair of tines is parallel to each other, one pair forming the drive tines and the other pair the output tines. Each corresponding set of two tines is disposed along the same axis having a common stem or base. The tines are secured by four bridges integral with the frame and connected to the stem. The arrangement is such that the pair of input tines vibrates in opposition to each other, while the pair of output tines vibrates with one tine going up while the other moves downwardly. As a result, the angular rate sensors drive frequency and the structural torque frequency are unequal. Therefore large displacements of the stem are unnecessary.

Abstract: A piezoelectric tuning fork microresonator advantageously is mounted in a package having a transparent region through which the microresonator can be tuned using a laser beam selectively to remove portions of weights provided on the tuning fork tine ends. The laser, located external to the package, may be controlled automatically in response to the output of an oscillator circuit using the microresonator as a frequency standard. The package also may house electronic microcircuitry and may include a capacitor using the package wall as a dielectric. When used with the microresonator in an oscillator circuit, the capacitor enables the frequency to be adjusted slightly by shorting together capacitor plate sections on the outside of the package. A batch fabrication technique is disclosed for automatically assembling many such packages on a single scored, optionally transparent substrate.

Abstract: .[.A vibratory angular rate sensor system preferably consists of a Z-cut quartz plate forming a mounting frame with a rectangular opening. Within the opening are mounted two pairs of tines. Each pair of tines is parallel to each other, one pair forming the drive tines and the other pair the output tines. Each corresponding set of two tines is disposed along the same axis having a common stem or base. The tines are secured by four bridges integral with the frame and connected to the stem. The arrangement is such that the pair of input tines vibrates in opposition to each other, while the pair of output tines vibrates with one tine going up while the other moves downwardly. As a result, the angular rate sensors drive frequency and the structural torque frequency are unequal. Therefore large displacements of the stem are unnecessary..]. .Iadd.

Abstract: .[.A vibratory angular rate sensing system may have one pair of tines forming an angle of about 60 degrees, resulting from the crystalline orientation of the Z-cut quartz wafer of the system. In one configuration each of the tines is provided with a mass offset from the axis of the associated tine, a pivot extends through the plane of symmery of the tines and may be connected to a dummy reaction mass. The resonant system is suspended from a mounting frame by a pair of suspension bridges. A second embodiment of the invention features two groups of tines, each group including two pairs of tines arranged in the form of a cross. Again, an offset mass is associated with the free end of each tine and each group of tines is secured to its frame by a suspension bridge..]..Iadd.Vibratory angular rate sensing system having a support structure and a driven fork lying in a plane and having an axis of symmetry. The fork has first and second spaced apart tines.