Patents by Inventor Juergen Kielwein

Juergen Kielwein has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • WAFER HOLDER AND TEMPERATURE CONDITIONING ARRANGEMENT AND METHOD OF MANUFACTURING A WAFER
    Publication number: 20180025925
    Abstract: A wafer holder and temperature controlling arrangement has a metal circular wafer carrier plate, which covers a heater compartment. In the heater compartment a multitude of heater lamp tubes is arranged, which directly acts upon the circular wafer carrier plate. Latter is drivingly rotatable about the central axis. A wafer is held on the circular wafer carrier plate by means of a weight-ring residing upon the periphery of a wafer deposited on the wafer carrier plate.
    Type: Application
    Filed: October 3, 2017
    Publication date: January 25, 2018
    Inventors: Juergen Kielwein, Bart Scholte Von Mast, Rogier Lodder
  • Wafer holder and temperature conditioning arrangement and method of manufacturing a wafer
    Patent number: 9793144
    Abstract: A wafer holder and temperature controlling arrangement has a metal circular wafer carrier plate, which covers a heater compartment. In the heater compartment a multitude of heater lamp tubes is arranged, which directly acts upon the circular wafer carrier plate. Latter is drivingly rotatable about the central axis. A wafer is held on the circular wafer carrier plate by means of a weight-ring residing upon the periphery of a wafer deposited on the wafer carrier plate.
    Type: Grant
    Filed: August 30, 2011
    Date of Patent: October 17, 2017
    Assignee: EVATEC AG
    Inventors: Juergen Kielwein, Bart Scholte Von Mast, Rogier Lodder
  • WAFER HOLDER AND TEMPERATURE CONDITIONING ARRANGEMENT AND METHOD OF MANUFACTURING A WAFER
    Publication number: 20130052834
    Abstract: A wafer holder and temperature controlling arrangement has a metal circular wafer carrier plate, which covers a heater compartment. In the heater compartment a multitude of heater lamp tubes is arranged, which directly acts upon the circular wafer carrier plate. Latter is drivingly rotatable about the central axis. A wafer is held on the circular wafer carrier plate by means of a weight-ring residing upon the periphery of a wafer deposited on the wafer carrier plate.
    Type: Application
    Filed: August 30, 2011
    Publication date: February 28, 2013
    Applicant: OC Oerlikon Balzers AG
    Inventors: Juergen Kielwein, Bart Scholte Von Mast, Rogier Lodder