Patents by Inventor Juergen Penzing

Juergen Penzing has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6816247
    Abstract: In a moiré method for measuring the distortion of an optical imaging system in which and object grid having a two-dimensional object pattern is arranged in an object plane of the imaging system and an image grid having a two-dimensional image pattern is arranged in an image plane of the imaging system, these patterns are configured in the form of, for example cross-hatched patterns or checker board patterns, are adapted to suit one another such that a two-dimensional moiré fringe pattern that may be detected by a two-dimensional, spatially resolving, detection device is created when the object grid is imaged onto the image grid using the imaging system. Distortion components of the imaging system may be simultaneously determined along two differently oriented, in particular, two mutually orthogonal, image directions from a two-dimensional moiré fringe pattern.
    Type: Grant
    Filed: August 14, 2002
    Date of Patent: November 9, 2004
    Assignee: Carl Zeiss SMT AG
    Inventors: Joachim Heppner, Juergen Massig, Michael Arnz, Michael Kuechel, Juergen Penzing, Uwe Schellhorn