Abstract: Methods and systems for detecting pinholes in a film formed on a wafer or for monitoring a thermal process tool are provided. One method for detecting pinholes in a film formed on a wafer includes generating output responsive to light from the wafer using an inspection system. The output includes first output corresponding to defects on the wafer and second output that does not correspond to the defects. This method also includes detecting the pinholes in the film formed on the wafer using the second output. One method for monitoring a thermal process tool includes generating output responsive to light from a wafer using an inspection system. The output includes the first and second output described above. The wafer was processed by the thermal process tool prior to generating the output. The method also includes monitoring the thermal process tool using the second output.

Abstract: Methods and systems for determining drift in a position of a light beam with respect to a chuck are provided. One method includes illuminating a surface with the light beam. The surface has a predetermined position with respect to the chuck during illumination. The method also includes generating signals responsive to the illumination of the surface and determining the drift in the position of the light beam with respect to the chuck using the signals. One system includes an illumination subsystem configured to illuminate a fiduciary with the light beam. The fiduciary has a predetermined position with respect to the chuck during illumination. This system also includes a detector configured to generate signals responsive to the illumination of the fiduciary and a processor configured to use the signals to determine the drift in the position of the light beam with respect to the chuck.

Abstract: The invention relates to an accelerator pedal device that includes at least one pedal element that can be moved in relation to a base element, at least one retraction element, and at least one damper element that is used to dampen the pedal actuation movement and the pedal retraction movement of the pedal element, wherein the rotor of a motor unit is connected to the pedal element and a stator unit that is connected to the base unit, and wherein a clutch device is located between the motor unit and the pedal element, and the retraction unit includes a clutch cable and a motor cable, the pedal element is connected to the clutch cable and the motor unit to the motor cable.

Abstract: The invention relates to an accelerator pedal device that includes at least one pedal element that can be moved in relation to a base element, at least one retraction element, and at least one damper element that is used to dampen the pedal actuation movement and the pedal retraction movement of the pedal element, wherein the rotor of a motor unit is connected to the pedal element and a stator unit that is connected to the base unit, and wherein a clutch device is located between the motor unit and the pedal element, and the retraction unit includes a clutch cable and a motor cable, the pedal element is connected to the clutch cable and the motor unit to the motor cable.

Abstract: A simulator for simulating the performance of an intelligent is described. The simulator includes. a module for simulating any IN-typical event sequences (traffic simulator) according to the rules of traffic theory, and a module for the event-oriented simulation of the service control point (SCP simulator) using process models, The simulator also includes. an arrangement for exchanging data between the modules; an arrangement entering and storing the network configuration, communication service specification, and other simulation parameters, and for transferring them to the correct modules; and an arrangement outputting and/or storing the simulated data. Modules are also provided for simulating the SS7 signaling system, taking into account the functionalities of service relay points SRP and overload protection mechanisms within the IN. The simulation modules communicate in a file mode using transfer files or are linked in an online mode by a shared organization program: the online simulator.