Abstract: To make holes in ceramic green sheets that are needed to create feedthroughs, it is proposed to make the holes by using a gas that is under a higher pressure than atmospheric pressure and that is expelled in a pulsed manner from a pressure vessel and thereby acts on a principal surface of a ceramic green sheet, at at least one location at which a hole is to be made, in such a way that material is shot out of the ceramic green sheet at that location. This eliminates the disadvantages associated with the use of punches to punch holes.

Abstract: Disclosed in a power semiconductor module which includes a stack of carrier substrates, disposed one above the other in multiple layers and provided with at least one conductor track on at least one main surface, in which at least one electronic semiconductor component is disposed between two adjacent carrier substrates of the stack and is contacted electrically and heat-conductively to at least one conductor track of a carrier substrate disposed in the stack above the semiconductor component and to at least one further conductor track of a carrier substrate disposed in the stack below the semiconductor component. To both improve heat output and provide a compact design, the two outer carrier substrates of the stack are embodied as one upper and one lower housing wall of a closed housing part surrounding the at least one semiconductor component, and the interstices between the stacked carrier substrates are tightly closed by an encompassing wall secured to the carrier substrates.

Abstract: To make holes in ceramic green sheets that are needed to create feedthroughs, it is proposed to make the holes by using a gas that is under a higher pressure than atmospheric pressure and that is expelled in a pulsed manner from a pressure vessel and thereby acts on a principal surface of a ceramic green sheet, at at least one location at which a hole is to be made, in such a way that material is shot out of the ceramic green sheet at that location. This eliminates the disadvantages associated with the use of punches to punch holes.