Patents by Inventor Juha Allan Poutiainen

Juha Allan Poutiainen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatuses and methods for deposition of material on surfaces
    Publication number: 20060196418
    Abstract: An apparatus for depositing conformal thin films by sequential self saturating chemical reactions on heated surfaces is disclosed. The apparatus comprises a movable single or dual-lid system that has a substrate holder attached to a reaction chamber lid. In other embodiments, the apparatus comprises an exhaust flow plug, a gas distribution insert, a local heater or a minibatch system. Various methods suitable for ALD (Atomic Layer Deposition) are also enclosed.
    Type: Application
    Filed: March 4, 2005
    Publication date: September 7, 2006
    Inventors: Sven Lindfors, Juha Allan Poutiainen