Abstract: The invention relates to resonator structures of radio communication apparatus, especially bulk acoustic wave filter structures. According to the invention, a bulk acoustic filter structure is constructed with a lattice configuration, in which two of the filters have a different area than other two for creating very steep passband edges in the frequency response of the filter. Preferably, the filter structure further comprises a second lattice structure for increasing the stopband rejection ratio of the filter structure, and for allowing the use of a simple mechanical structure. The cascaded configuration allows the construction of the filter structure in such a way, that the electrodes of the input and output port are at the same layer, thereby removing the need to make vias in the piezoelectric layer, which results in considerable simplification of the manufacturing process.

Abstract: The invention relates to resonator structures of radio communication apparatus. According to the invention, at least one resonator structure and at least one switch structure are manufactured on the same substrate during the same process. This is especially advantageous when using bridge type BAW resonators and micromechanical switches, since the same process steps which are used for creating the bridge structures, can be used to create the micromechanical switch structure. Integration of switch structures and resonators on the same substrate allows the manufacture of very compact filter and resonator structures needed for multi-system mobile communication means. According to another aspect of the invention a special property of BAW resonators is utilized, namely that BAW resonators can be integrated on substrates which are commonly used for active circuitry, such as silicon (Si) and gallium arsenide (GaAs) surfaces.

Abstract: The invention relates to resonator structures of radio communication apparatus. According to the invention, a micromechanical switch and a resonator are realized in a single combined structure. Combination of switch and resonator structures allows the manufacture of very compact filter and resonator structures needed for multi-system mobile communication means.