Patents by Inventor Jui-Cheng PENG

Jui-Cheng PENG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SYSTEM AND METHOD FOR IMPROVING IMMERSION SCANNER OVERLAY PERFORMANCE
    Publication number: 20120045192
    Abstract: System and method for improving immersion scanner overlay performance are described. One embodiment is a method of improving overlay performance of an photolithography immersion scanner comprising a wafer table having lens cooling water (“LCW”) disposed in a water channel therein, the wafer table having an input for receiving the LCW into the water channel and an output for expelling the LCW from the water channel. The method comprises providing a water tank at at least one of the wafer table input and the wafer table output; monitoring a pressure of water in the water tank; and maintaining the pressure of the water in the water tank at a predetermined level.
    Type: Application
    Filed: November 3, 2011
    Publication date: February 23, 2012
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Jui-Cheng PENG, Tzung-Chi FU, Chin-Hsiang LIN, Chien-Hsun LIN, Chun-Hung LIN, Yao-Wen GUO, Shy-Jay LIN, Heng-Hsin LIU