Patents by Inventor Jui-Min Lee
Jui-Min Lee has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11069559Abstract: A semiconductor structure and method for forming such a structure are disclosed by the present invention. In the method, before a first trench in a pre-processed substrate is filled with any filling material, an auxiliary layer is formed over an inner surface of the first trench. Afterward, a first filling dielectric is formed and an etch back process is performed so that a top surface of the first filling dielectric is higher than that of the pre-processed substrate, and a second filling dielectric is then formed and subject to a second planarization process.Type: GrantFiled: June 22, 2020Date of Patent: July 20, 2021Assignee: NEXCHIP SEMICONDUCTOR CORPORATIONInventors: Sun-Hung Chen, Tsun-Min Cheng, Jui-Min Lee, Wei Xiang, Renwei Zhu
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Patent number: 10672864Abstract: A semiconductor memory device includes a semiconductor substrate, a first support layer, a first electrode, a capacitor dielectric layer, and a second electrode. The first support layer is disposed on the semiconductor substrate. The first electrode is disposed on the semiconductor substrate and penetrates the first support layer. The capacitor dielectric layer is disposed on the first electrode. The second electrode is disposed on the semiconductor substrate, and at least a part of the capacitor dielectric layer is disposed between the first electrode and the second electrode. The first support layer includes a carbon doped nitride layer, and a carbon concentration of a bottom portion of the first support layer is higher than a carbon concentration of a top portion of the first support layer.Type: GrantFiled: March 11, 2019Date of Patent: June 2, 2020Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.Inventors: Tzu-Chin Wu, Wei-Hsin Liu, Yi-Wei Chen, Chia-Lung Chang, Jui-Min Lee, Po-Chun Chen, Li-Wei Feng, Ying-Chiao Wang, Wen-Chieh Lu, Chien-Ting Ho, Tsung-Ying Tsai, Kai-Ping Chen
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Patent number: 10475662Abstract: A method of forming a semiconductor memory device includes following steps. First of all, a target layer is provided, and a mask structure is formed on the target layer, with the mask structure including a first mask layer a sacrificial layer and a second mask layer. The first mask layer and the second mask layer include the same material but in different containing ratio. Next, the second mask layer and the sacrificial layer are patterned, to form a plurality of mandrels. Then, a plurality of spacer patterns are formed to surround the mandrels, and then transferred into the first mask layer to form a plurality of opening not penetrating the first mask layer. Finally, the first mask layer is used as a mask to etch the target layer, to form a plurality of target patterns.Type: GrantFiled: October 12, 2018Date of Patent: November 12, 2019Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.Inventors: Feng-Yi Chang, Wei-Hsin Liu, Ying-Chih Lin, Jui-Min Lee, Gang-Yi Lin, Fu-Che Lee
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Patent number: 10475900Abstract: A method for manufacturing a semiconductor device with a cobalt silicide film is provided in the present invention. The method includes the steps of providing a silicon structure with an interlayer dielectric formed thereon, forming a contact hole in the interlayer dielectric to expose the silicon structure, depositing a cobalt film on the exposed silicon structure at a temperature between 300° C.-400° C., wherein a cobalt protecting film is in-situ formed on the surface of the cobalt film, performing a rapid thermal process to transform the cobalt film into a cobalt silicide film, and removing untransformed cobalt film.Type: GrantFiled: January 11, 2018Date of Patent: November 12, 2019Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.Inventors: Kai-Jiun Chang, Tsun-Min Cheng, Chih-Chieh Tsai, Jui-Min Lee, Yi-Wei Chen, Chia-Lung Chang, Wei-Hsin Liu
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Patent number: 10453677Abstract: A method of forming an oxide layer includes the following steps. A substrate is provided. A surface of the substrate is treated to form an oxygen ion-rich surface. A spin-on-dielectric layer is formed on the oxygen ion-rich surface of the substrate. The present invention also provides a method of forming an oxide layer including the following steps. A substrate is provided. A surface of the substrate is treated with a hydrogen peroxide (H2O2) solution or a surface of the substrate is treated with oxygen containing gas, to form an oxygen ion-rich surface. A spin-on-dielectric layer is formed on the oxygen ion-rich surface of the substrate.Type: GrantFiled: July 9, 2017Date of Patent: October 22, 2019Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.Inventors: Cheng-Hsu Huang, Jui-Min Lee, Ching-Hsiang Chang, Yi-Wei Chen, Wei-Hsin Liu, Shih-Fang Tzou
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Publication number: 20190221571Abstract: A semiconductor memory device includes a semiconductor substrate and a patterned conductive structure. The patterned conductive structure is disposed on the semiconductor substrate. The patterned conductive structure includes a first silicon conductive layer, a second silicon conductive layer, an interface layer, a barrier layer, and a metal conductive layer. The second silicon conductive layer is disposed on the first silicon conductive layer. The interface layer is disposed between the first silicon conductive layer and the second silicon conductive layer, and the interface layer includes oxygen. The barrier layer is disposed on the second silicon conductive layer. The metal conductive layer is disposed on the barrier layer.Type: ApplicationFiled: January 31, 2018Publication date: July 18, 2019Inventors: Wei-Hsin Liu, Cheng-Hsu Huang, Jui-Min Lee, Yi-Wei Chen
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Publication number: 20190206982Abstract: A semiconductor memory device includes a semiconductor substrate, a first support layer, a first electrode, a capacitor dielectric layer, and a second electrode. The first support layer is disposed on the semiconductor substrate. The first electrode is disposed on the semiconductor substrate and penetrates the first support layer. The capacitor dielectric layer is disposed on the first electrode. The second electrode is disposed on the semiconductor substrate, and at least a part of the capacitor dielectric layer is disposed between the first electrode and the second electrode. The first support layer includes a carbon doped nitride layer, and a carbon concentration of a bottom portion of the first support layer is higher than a carbon concentration of a top portion of the first support layer.Type: ApplicationFiled: March 11, 2019Publication date: July 4, 2019Inventors: Tzu-Chin Wu, Wei-Hsin Liu, Yi-Wei Chen, Chia-Lung Chang, Jui-Min Lee, Po-Chun Chen, Li-Wei Feng, Ying-Chiao Wang, Wen-Chieh Lu, Chien-Ting Ho, Tsung-Ying Tsai, Kai-Ping Chen
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Patent number: 10340278Abstract: A semiconductor memory device includes a semiconductor substrate and a patterned conductive structure. The patterned conductive structure is disposed on the semiconductor substrate. The patterned conductive structure includes a first silicon conductive layer, a second silicon conductive layer, an interface layer, a barrier layer, and a metal conductive layer. The second silicon conductive layer is disposed on the first silicon conductive layer. The interface layer is disposed between the first silicon conductive layer and the second silicon conductive layer, and the interface layer includes oxygen. The barrier layer is disposed on the second silicon conductive layer. The metal conductive layer is disposed on the barrier layer.Type: GrantFiled: January 31, 2018Date of Patent: July 2, 2019Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.Inventors: Wei-Hsin Liu, Cheng-Hsu Huang, Jui-Min Lee, Yi-Wei Chen
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Publication number: 20190172722Abstract: A method of forming a semiconductor memory device includes following steps. First of all, a target layer is provided, and a mask structure is formed on the target layer, with the mask structure including a first mask layer a sacrificial layer and a second mask layer. The first mask layer and the second mask layer include the same material but in different containing ratio. Next, the second mask layer and the sacrificial layer are patterned, to form a plurality of mandrels. Then, a plurality of spacer patterns are formed to surround the mandrels, and then transferred into the first mask layer to form a plurality of opening not penetrating the first mask layer. Finally, the first mask layer is used as a mask to etch the target layer, to form a plurality of target patterns.Type: ApplicationFiled: October 12, 2018Publication date: June 6, 2019Inventors: Feng-Yi Chang, Wei-Hsin Liu, Ying-Chih Lin, Jui-Min Lee, Gang-Yi Lin, Fu-Che Lee
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Patent number: 10312080Abstract: The present invention provides a method for forming an amorphous silicon multiple layer structure, the method comprises the flowing steps: first, a substrate material layer is provided, next, a first amorphous silicon layer is formed on the substrate material layer, wherein the first amorphous silicon layer includes a plurality of hydrogen atoms disposed therein, afterwards, an UV curing process is performed to the first amorphous silicon layer, so as to remove the hydrogen atoms from the first amorphous silicon layer, finally, a second amorphous silicon layer is formed on the first amorphous silicon layer.Type: GrantFiled: January 2, 2018Date of Patent: June 4, 2019Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.Inventors: Mei-Ling Chen, Wei-Hsin Liu, Yi-Wei Chen, Ching-Hsiang Chang, Jui-Min Lee, Chia-Lung Chang, Tzu-Chin Wu, Shih-Fang Tzou
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Patent number: 10276650Abstract: A semiconductor memory device includes a semiconductor substrate, a first support layer, a first electrode, a capacitor dielectric layer, and a second electrode. The first support layer is disposed on the semiconductor substrate. The first electrode is disposed on the semiconductor substrate and penetrates the first support layer. The capacitor dielectric layer is disposed on the first electrode. The second electrode is disposed on the semiconductor substrate, and at least a part of the capacitor dielectric layer is disposed between the first electrode and the second electrode. The first support layer includes a carbon doped nitride layer, and a carbon concentration of a bottom portion of the first support layer is higher than a carbon concentration of a top portion of the first support layer.Type: GrantFiled: March 21, 2018Date of Patent: April 30, 2019Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.Inventors: Tzu-Chin Wu, Wei-Hsin Liu, Yi-Wei Chen, Chia-Lung Chang, Jui-Min Lee, Po-Chun Chen, Li-Wei Feng, Ying-Chiao Wang, Wen-Chieh Lu, Chien-Ting Ho, Tsung-Ying Tsai, Kai-Ping Chen
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Patent number: 10262895Abstract: The present invention provides a method for fabricating a semiconductor device, comprising at least the steps of: providing a substrate in which a memory region and a peripheral region are defined, the memory region includes a plurality of memory cells, each memory cell includes at least a first transistor and a capacitor, the peripheral region compress a second transistor, a first insulating layer is formed within the memory region and the peripheral region by an atomic layer deposition process, covering the capacitor of the memory cells in the memory region and the second transistor in the peripheral region, and a second insulating layer is formed, overlying the first insulating layer and the peripheral region. Finally, a contact structure is formed within the second insulating layer, and electrically connecting the second transistor.Type: GrantFiled: January 2, 2018Date of Patent: April 16, 2019Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.Inventors: Mei-Ling Chen, Wei-Hsin Liu, Yi-Wei Chen, Chia-Lung Chang, Jui-Min Lee, Ching-Hsiang Chang, Tzu-Chin Wu, Shih-Fang Tzou
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Publication number: 20180366323Abstract: A method of forming an oxide layer includes the following steps. A substrate is provided. A surface of the substrate is treated to form an oxygen ion-rich surface. A spin-on-dielectric layer is formed on the oxygen ion-rich surface of the substrate. The present invention also provides a method of forming an oxide layer including the following steps. A substrate is provided. A surface of the substrate is treated with a hydrogen peroxide (H2O2) solution or a surface of the substrate is treated with oxygen containing gas, to form an oxygen ion-rich surface. A spin-on-dielectric layer is formed on the oxygen ion-rich surface of the substrate.Type: ApplicationFiled: July 9, 2017Publication date: December 20, 2018Inventors: Cheng-Hsu Huang, Jui-Min Lee, Ching-Hsiang Chang, Yi-Wei Chen, Wei-Hsin Liu, Shih-Fang Tzou
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Publication number: 20180361422Abstract: A spin-on-dielectric process includes the following steps. A substrate is provided. A flowable material is spread on a surface of the substrate to forma spin-on-dielectric layer on the substrate, wherein the flowable material is heated to a temperature higher than 25° C.Type: ApplicationFiled: March 29, 2018Publication date: December 20, 2018Inventors: Jui-Min Lee, Ching-Hsiang Chang, Cheng-Hsu Huang, Yi-Wei Chen, Wei-Hsin Liu, Shih-Fang Tzou
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Publication number: 20180308923Abstract: A semiconductor memory device includes a semiconductor substrate, a first support layer, a first electrode, a capacitor dielectric layer, and a second electrode. The first support layer is disposed on the semiconductor substrate. The first electrode is disposed on the semiconductor substrate and penetrates the first support layer. The capacitor dielectric layer is disposed on the first electrode. The second electrode is disposed on the semiconductor substrate, and at least a part of the capacitor dielectric layer is disposed between the first electrode and the second electrode. The first support layer includes a carbon doped nitride layer, and a carbon concentration of a bottom portion of the first support layer is higher than a carbon concentration of a top portion of the first support layer.Type: ApplicationFiled: March 21, 2018Publication date: October 25, 2018Inventors: Tzu-Chin Wu, Wei-Hsin Liu, Yi-Wei Chen, Chia-Lung Chang, Jui-Min Lee, Po-Chun Chen, Li-Wei Feng, Ying-Chiao Wang, Wen-Chieh Lu, Chien-Ting Ho, Tsung-Ying Tsai, Kai-Ping Chen
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Publication number: 20180212034Abstract: A method for manufacturing a semiconductor device with a cobalt silicide film is provided in the present invention. The method includes the steps of providing a silicon structure with an interlayer dielectric formed thereon, forming a contact hole in the interlayer dielectric to expose the silicon structure, depositing a cobalt film on the exposed silicon structure at a temperature between 300° C-400° C., wherein a cobalt protecting film is in-situ formed on the surface of the cobalt film, performing a rapid thermal process to transform the cobalt film into a cobalt silicide film, and removing untransformed cobalt film.Type: ApplicationFiled: January 11, 2018Publication date: July 26, 2018Inventors: Kai-Jiun Chang, Tsun-Min Cheng, Chih-Chieh Tsai, Jui-Min Lee, Yi-Wei Chen, Chia-Lung Chang, Wei-Hsin Liu
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Publication number: 20180190488Abstract: The present invention provides a method for forming an amorphous silicon multiple layer structure, the method comprises the flowing steps: first, a substrate material layer is provided, next, a first amorphous silicon layer is formed on the substrate material layer, wherein the first amorphous silicon layer includes a plurality of hydrogen atoms disposed therein, afterwards, an UV curing process is performed to the first amorphous silicon layer, so as to remove the hydrogen atoms from the first amorphous silicon layer, finally, a second amorphous silicon layer is formed on the first amorphous silicon layer.Type: ApplicationFiled: January 2, 2018Publication date: July 5, 2018Inventors: Mei-Ling Chen, Wei-Hsin Liu, Yi-Wei Chen, Ching-Hsiang Chang, Jui-Min Lee, Chia-Lung Chang, Tzu-Chin Wu, Shih-Fang Tzou
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Publication number: 20180190662Abstract: A method of forming a bit line gate structure of a dynamic random access memory (DRAM) includes the following. A hard mask layer is formed on a metal stack by a chemical vapor deposition process importing nitrogen (N2) gases and then importing amonia (NH3) gases. The present invention also provides a bit line gate structure of a dynamic random access memory (DRAM) including a metal stack and a hard mask. The metal stack includes a polysilicon layer, a titanium layer, a titanium nitride layer, a first tungsten nitride layer, a tungsten layer and a second tungsten nitride layer stacked from bottom to top. The hard mask is disposed on the metal stack.Type: ApplicationFiled: December 27, 2017Publication date: July 5, 2018Inventors: Tzu-Chin Wu, Wei-Hsin Liu, Yi-Wei Chen, Mei-Ling Chen, Chia-Lung Chang, Ching-Hsiang Chang, Jui-Min Lee, Tsun-Min Cheng, Lin-Chen Lu, Shih-Fang Tzou, Kai-Jiun Chang, Chih-Chieh Tsai, Tzu-Chieh Chen, Chia-Chen Wu
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Publication number: 20180190658Abstract: The present invention provides a method for fabricating a semiconductor device, comprising at least the steps of: providing a substrate in which a memory region and a peripheral region are defined, the memory region includes a plurality of memory cells, each memory cell includes at least a first transistor and a capacitor, the peripheral region compress a second transistor, a first insulating layer is formed within the memory region and the peripheral region by an atomic layer deposition process, covering the capacitor of the memory cells in the memory region and the second transistor in the peripheral region, and a second insulating layer is formed, overlying the first insulating layer and the peripheral region. Finally, a contact structure is formed within the second insulating layer, and electrically connecting the second transistor.Type: ApplicationFiled: January 2, 2018Publication date: July 5, 2018Inventors: Mei-Ling Chen, Wei-Hsin Liu, Yi-Wei Chen, Chia-Lung Chang, Jui-Min Lee, Ching-Hsiang Chang, Tzu-Chin Wu, Shih-Fang Tzou
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Patent number: 9754943Abstract: A dynamic random access memory (DRAM) device includes a substrate, plural word lines and plural bit lines. The word lines are disposed in the substrate along a first trench extending along a first direction. Each of the word lines includes a multi-composition barrier layer, wherein the multi-composition barrier layer includes TiSixNy with x and y being greater than 0 and the multi-composition barrier layer is silicon-rich at a bottom portion thereof and is nitrogen-rich at a top portion thereof. The bit lines are disposed over the word lines and extended along a second direction across the first direction.Type: GrantFiled: September 21, 2016Date of Patent: September 5, 2017Assignees: UNITED MICROELECTRONICS CORP., Fujian Jinhua Integrated Circuit Co., Ltd.Inventors: Kai-Jiun Chang, Yi-Wei Chen, Tsun-Min Cheng, Chih-Chieh Tsai, Wei-Hsin Liu, Jui-Min Lee, Chia-Lung Chang