Abstract: The present invention is a device and a method thereof measuring a physical state of a material by spectrum, the device comprising: a first action path where a material to be measured is contained; a detecting unit detecting a spectrum; and a processing unit obtaining a deposition state relating to the material to be measured based on the spectrum. An advance monitoring can be supplied when a deposit is formed by the present invention, therefore, the deposition process can be observed and/or controlled immediately, and the yield and degree of automation will be greatly improved.

Abstract: A positioning device for a radio frequency matcher comprises mainly a micro controller, and at least two detecting elements connected to the micro controller. The detecting elements are disposed on electric motors to detect the rotation angles of the electric motors. When the electric motors adjust the positions of the moving pieces of the tuning elements based on the volume of error signals to change the electrical reactance values so that they may approximately meet the requirement of the radio frequency load and that the radio frequency load may achieve a highest possible power, the micro controller may interpret the signals of the rotation angle detecting elements and output the interpreted values for a user to determine whether the moving pieces of the tuning elements are at right positions to approximately meet the requirement of the radio frequency load and maximize the power of the radio frequency load of the radio frequency matcher.

Abstract: A method for measuring gas dissociation degrees is provided. The method comprises the following steps. A reaction process with at least one reactive gas in a main path and a second path connecting to the main path is performed. A plasma gas dissociation degree of the reactive gas in the reaction process is detected. A dissociation quantity value of the reactive gas in the reaction process is calculated. An amount of the reactive gas in the main path after the reaction process is provided. The reactive gas is discharged according to the dissociation quantity value of the reactive gas for removing contaminants in the main path.

Abstract: In current application of gas, the dissociation degree in some special gas is generally detected and controlled by a physical or chemical method instead of an optical one. Solution schemes that are adopted include but are not limited to adjusting gas flow rates, gas proportioning or gas disposal. But up to now there has not been any definitively effective solution scheme. A primary objective of the present invention is to provide a method and a device for measuring gas dissociation degrees. The principle of the present invention is to detect the gas dissociation degree in a tube body and to calculate the relative dissociation quantity value by means of a device according to the present invention. When the contamination value in a primary path of gas is too high, an appropriate amount of dissociated reactive gas is discharged via a second path to remove contaminants in the primary path to achieve efficient and effective cleaning.

Abstract: A positioning device for a radio frequency matcher comprises mainly a micro controller, and at least two detecting elements connected to the micro controller. The detecting elements are disposed on electric motors to detect the rotation angles of the electric motors. When the electric motors adjust the positions of the moving pieces of the tuning elements based on the volume of error signals to change the electrical reactance values so that they may approximately meet the requirement of the radio frequency load and that the radio frequency load may achieve a highest possible power, the micro controller may interpret the signals of the rotation angle detecting elements and output the interpreted values for a user to determine whether the moving pieces of the tuning elements are at right positions to approximately meet the requirement of the radio frequency load and maximize the power of the radio frequency load of the radio frequency matcher.