Patents by Inventor Ju-Ill LEE

Ju-Ill LEE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus and method of disassembling and assembling the same
    Patent number: 8968474
    Abstract: A substrate processing apparatus includes: a chamber including a body having an open portion and a door for blocking the open portion; a substrate supporter connected to the door; and a door operating means including a rotation shaft for straightly moving and rotating the door, the door and the body separated in parallel from each other by straightly moving the door.
    Type: Grant
    Filed: September 25, 2011
    Date of Patent: March 3, 2015
    Assignee: Jusung Engineering Co., Ltd.
    Inventors: Kun-Young Lim, Do-Hyung Kim, Ju-Ill Lee
  • SUBSTRATE PROCESSING APPARATUS AND METHOD OF DISASSEMBLING AND ASSEMBLING THE SAME
    Publication number: 20120091871
    Abstract: A substrate processing apparatus includes: a chamber including a body having an open portion and a door for blocking the open portion; a substrate supporter connected to the door; and a door operating means including a rotation shaft for straightly moving and rotating the door, the door and the body separated in parallel from each other by straightly moving the door.
    Type: Application
    Filed: September 25, 2011
    Publication date: April 19, 2012
    Applicant: JUSUNG ENGINEERING CO., LTD.
    Inventors: Kun-Young LIM, Do-Hyung KIM, Ju-Ill LEE