Patents by Inventor Juin-Fang Wang

Juin-Fang Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Composition and method for reducing dishing in patterned metal during CMP process
    Patent number: 6149830
    Abstract: A composition for reducing dishing in patterned large metal surfaces embedded in a dielectric as a workpiece during chemical mechanical polishing, comprising: a viscosity increasing amount of viscosity enhancer in replacement of a portion of deionized water in a slurry containing an abrasive.
    Type: Grant
    Filed: September 17, 1998
    Date of Patent: November 21, 2000
    Assignees: Siemens Aktiengesellschaft, International Business Machines Corporation
    Inventors: Chienting Lin, Juin-Fang Wang, Fen Fen Jamin, Ravikumar Ramachandran