Patents by Inventor Ju-Jin An

Ju-Jin An has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for manufacturing a semiconductor device
    Patent number: 7297638
    Abstract: A method of forming patterns in a semiconductor device comprises: forming a conductive film on a substrate; forming an anti-reflective layer on the conductive film; cleaning oxide residues on the anti-reflective layer using a first cleaning solution; cleaning the oxide residues on the anti-reflective layer using a second cleaning solution; forming a photoresist pattern on the anti-reflective layer; and patterning the conductive film using the photoresist pattern.
    Type: Grant
    Filed: February 20, 2004
    Date of Patent: November 20, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Ju-Jin An, Soo-Woong Lee
  • Method for manufacturing a semiconductor device
    Publication number: 20050032371
    Abstract: A method of forming patterns in a semiconductor device comprises: forming a conductive film on a substrate; forming an anti-reflective layer on the conductive film; cleaning oxide residues on the anti-reflective layer using a first cleaning solution; cleaning the oxide residues on the anti-reflective layer using a second cleaning solution; forming a photoresist pattern on the anti-reflective layer; and patterning the conductive film using the photoresist pattern.
    Type: Application
    Filed: February 20, 2004
    Publication date: February 10, 2005
    Inventors: Ju-Jin An, Soo-Woong Lee